Orientation of germanium nanowires on germanium and silicon substrates for nanodevices

被引:4
作者
Beretta, S. [1 ]
Bosi, M. [1 ]
Seravalli, L. [1 ]
Musayeva, N. [2 ]
Ferrari, C. [1 ]
机构
[1] CNR, IMEM Inst, Parco Sci 37a, I-43100 Parma, Italy
[2] Inst Phys ANAS, H Javid Ave 131, AZ-1143 Baku, Azerbaijan
关键词
Germanium; Nanowires; Epitaxy; Substrate; Silicon; Sonication; GROWTH; DIFFUSION; ARRAYS; SI;
D O I
10.1016/j.matpr.2019.08.184
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Germanium nanowires were grown using gold colloids on germanium and silicon substrates, (0 0 1) and (1 1 1) oriented. The presence of Si oxide on the surface inhibits the epitaxial growth of the nanowires, resulting in the presence of randomly oriented nanostructures. Different etching procedures of Si oxide are discussed and evaluated, with the goal to obtain epitaxial nanowires aligned with the substrate crystallographic directions. Germanium oxide may be thermally etched during the growth procedure, so that on Ge substrates the nanowires are generally well aligned without any wet-etch. We also study the effect of sonication of the nanowires, to minimize the damage to the nanostructures when they are dropcasted to a carrier substrate for further studies. (C) 2019 Elsevier Ltd. All rights reserved.
引用
收藏
页码:30 / 36
页数:7
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