High-resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white-light interferograms

The proposed profilometer is based on an optical spectral analysis of white-light interferograms. Phase calculation algorithms are applied within the spectral domain for high-resolution profilometry. Absolute one-way optical path differences are measured without any axial scanning of the interferometer. This method is well adapted for the analysis of rough or binary surfaces with a 1 nm resolution.