High-resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white-light interferograms

被引：2
|
作者：
Sandoz, P
Tribillon, G
Perrin, H
机构：
来源：
JOURNAL OF MODERN OPTICS | 1996年 / 43卷 / 04期
关键词：
Algorithms - Calculations - Interferometers - Level measurement - Light interference - Phase measurement - Phase shift - Roughness measurement - Spectroscopy;
D O I：
10.1080/095003496155823
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The proposed profilometer is based on an optical spectral analysis of white-light interferograms. Phase calculation algorithms are applied within the spectral domain for high-resolution profilometry. Absolute one-way optical path differences are measured without any axial scanning of the interferometer. This method is well adapted for the analysis of rough or binary surfaces with a 1 nm resolution.
引用
收藏
页码：701 / 708
页数：8
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