Analysis on the adhesion of micro-comb structure in MEMS

The comb capacitive micromachined gyroscope is a kind of typical MEMS sensor. Electrostatic driving and comb capacitive detection are its typical working mode. Recently, researchers have found that the narrow space between two combs can result in comb adhesion easily because of micro scaling effect. In this paper, some micro forces such as capillary force, Van der Waals force, electrostatic force and Casimir force were analyzed and the relation curves of micro force and its acting distance were obtained. In order to make sure the influences of relative humidity on the micro-combs, a contrast experiment was also carried out. Through analysis on the micro forces, the acting distance curves of micro forces were finally obtained.