Alumina based low permittivity substrate utilizing superplastically foaming method

被引：5

作者：

Wakiyama, Miyo ^{[1
]}

Hayashi, Hidetaka ^{[1
]}

Kishimoto, Akira ^{[1
]}

机构：

[1] Okayama Univ, Div Mol & Mat Sci, Grad Sch Nat Sci & Technol, Kita Ku, Okayama 7008530, Japan

来源：

JOURNAL OF THE CERAMIC SOCIETY OF JAPAN | 2010年 / 118卷 / 1383期

关键词：

Alumina; Dielectric constant; Closed pore; Superplasticity; Humidity; ELECTRICAL-PROPERTIES; CERAMIC FOAMS; ZIRCONIA; FILMS; FABRICATION;

D O I：

10.2109/jcersj2.118.1090

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Alumina based closed pore dominated substrates have been fabricated by using superplastically foaming method developed by our group. Co-dispersing of magnesium aluminate spinel (Spinel) and zirconia without dopant (0YZ) provided adequate superplastisity to alumina matrix, while individual dispersion of spinel or zirconia resulted in only small deformation. The dielectric constant of superplastically foamed alumina decreased monotonically with porosity. Introduced pores were all closed nature at least up to 30% of porosity, at that porosity the permittivity became half as that of full dense one. Effect of the sweating water or ambient humidity has been proved to be identical to those of full dense one, which is favorable for semiconductor substrate. (C)2010 The Ceramic Society of Japan. All rights reserved.

引用

页码：1090 / 1093

页数：4

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