Electret-based Out-Of-Plane Micro Energy Harvester with Parylene-C Serving as the Electret and Spring Material

被引：7
|
作者：
Genter, S. [1 ]
Langhof, T. [1 ]
Paul, O. [1 ]
机构：
[1] Univ Freiburg, Dept Microsyst Engn IMTEK, Freiburg, Germany
来源：
EUROSENSORS 2015 | 2015年 / 120卷
关键词：
Enery Harvesting; Electret; Out-of-Plane; Corona Discharge; Parylene-C;
D O I：
10.1016/j.proeng.2015.08.630
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A micro energy harvesting device based on electrostatic transduction using Parylene-C as the electret layer and spring material of an out-of-plane generator (OoPG) is presented. This approach is advantageous for three reasons. First the fabrication of the device can be realized with simpler processing steps compared to in-plane configurations. Second, being unstructured the electret has a larger area and can be charged more effectively by a corona discharge. As a consequence, thirdly, the output power is potentially higher. In this paper the design, fabrication and characterization of such an OoPG are described. (C) 2015 The Authors. Published by Elsevier Ltd.
引用
收藏
页码：341 / 344
页数：4
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