Nanocrystalline-to-amorphous transition in nanolaminates grown by low temperature atomic layer deposition and related mechanical properties

被引：58

作者：

Raghavan, R. ^{[1
]}

Bechelany, M. ^{[2
]}

Parlinska, M. ^{[3
]}

Frey, D. ^{[1
]}

Mook, W. M. ^{[1
]}

Beyer, A. ^{[4
]}

Michler, J. ^{[1
]}

Utke, I. ^{[1
]}

机构：

[1] EMPA, Swiss Fed Labs Mat Sci & Technol, Lab Mech Mat & Nanostruct, CH-3602 Thun, Switzerland

[2] Univ Montpellier 2, Inst Europe Membranes IEM, ENSCM, CNRS,UM2,UMR 5635, F-34095 Montpellier 2, France

[3] EMPA, Swiss Fed Labs Mat Sci & Technol, Electron Microscopy Ctr, CH-8600 Dubendorf, Switzerland

[4] Univ Bielefeld, Fac Phys, D-33615 Bielefeld, Germany

来源：

APPLIED PHYSICS LETTERS | 2012年 / 100卷 / 19期

关键词：

NANOSTRUCTURED MATERIALS; ELECTRON-MICROSCOPY; BEHAVIOR; HARDNESS; METALS; DESIGN; FILMS; OXIDE; GRAIN;

D O I：

10.1063/1.4711767

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on a comprehensive structural and nanoindentation study of nanolaminates of Al2O3 and ZnO synthesized by atomic layer deposition (ALD). By reducing the bilayer thickness from 50 nm to below 1 nm, the nanocrystal size could be controlled in the nanolaminate structure. The softer and more compliant response of the multilayers as compared to the single layers of Al2O3 and ZnO is attributed to the structural change from nanocrystalline to amorphous at smaller bilayer thicknesses. It is also shown that ALD is a unique technique for studying the inverse Hall-Petch softening mechanism (E. Voce and D. Tabor, J. Inst. Metals 79(12), 465 (1951)) related to grain size effects in nanomaterials. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4711767]

引用

页数：4

共 37 条

[1] Overview no. 130 - Size effects in materials due to microstructural and dimensional constraints: A comparative review [J].

Arzt, E .

ACTA MATERIALIA, 1998, 46 (16) :5611-5626

[2] Mechanical and barrier properties of MOCVD processed alumina coatings on Ti6Al4V titanium alloy [J].

Balcaen, Y. ;

Radutoiu, N. ;

Alexis, J. ;

Beguin, J. -D. ;

Lacroix, L. ;

Samelor, D. ;

Vahlas, C. .

SURFACE & COATINGS TECHNOLOGY, 2011, 206 (07) :1684-1690

[3] A transmission electron microscopy study of the deformation behavior underneath nanoindents in nanoscale Al-TiN multilayered composites [J].

Bhattacharyya, D. ;

Mara, N. A. ;

Dickerson, P. ;

Hoagland, R. G. ;

Misra, A. .

PHILOSOPHICAL MAGAZINE, 2010, 90 (13) :1711-1724

[4] Oriented Growth of Al2O3:ZnO Nanolaminates for Use as Electron-Selective Electrodes in Inverted Polymer Solar Cells [J].

Cheun, Hyeunseok ;

Fuentes-Hernandez, Canek ;

Shim, Jaewon ;

Fang, Yunnan ;

Cai, Ye ;

Li, Hong ;

Sigdel, Ajaya K. ;

Meyer, Jens ;

Maibach, Julia ;

Dindar, Amir ;

Zhou, Yinhua ;

Berry, Joseph J. ;

Bredas, Jean-Luc ;

Kahn, Antoine ;

Sandhage, Kenneth H. ;

Kippelen, Bernard .

ADVANCED FUNCTIONAL MATERIALS, 2012, 22 (07) :1531-1538

[5] ON THE VALIDITY OF THE HALL-PETCH RELATIONSHIP IN NANOCRYSTALLINE MATERIALS [J].

CHOKSHI, AH ;

ROSEN, A ;

KARCH, J ;

GLEITER, H .

SCRIPTA METALLURGICA, 1989, 23 (10) :1679-1683

[6] MODEL OF SUPERLATTICE YIELD STRESS AND HARDNESS ENHANCEMENTS [J].

CHU, X ;

BARNETT, SA .

JOURNAL OF APPLIED PHYSICS, 1995, 77 (09) :4403-4411

[7] Urchin-inspired zinc oxide as building blocks for nanostructured solar cells [J].

Elias, Jamil ;

Bechelany, Mikhael ;

Utke, Ivo ;

Erni, Rolf ;

Hosseini, Davood ;

Michler, Johann ;

Philippe, Laetitia .

NANO ENERGY, 2012, 1 (05) :696-705

[8] Hollow Urchin-like ZnO thin Films by Electrochemical Deposition [J].

Elias, Jamil ;

Levy-Clement, Claude ;

Bechelany, Mikhael ;

Michler, Johann ;

Wang, Guillaume-Yangshu ;

Wang, Zhao ;

Philippe, Laetitia .

ADVANCED MATERIALS, 2010, 22 (14) :1607-+

[9] Atomic Layer Deposition: An Overview [J].

George, Steven M. .

CHEMICAL REVIEWS, 2010, 110 (01) :111-131

[10] Nanostructured materials: Basic concepts and microstructure [J].

Gleiter, H .

ACTA MATERIALIA, 2000, 48 (01) :1-29

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