Design and microfabrication of MEMS 2D gyroscope

被引：0

作者：

Zhou, TS ^{[1
]}

Lai, CY ^{[1
]}

机构：

[1] Univ Alberta, Fac Engn, Edmonton, AB T6G 2V4, Canada

来源：

PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON MECHANICAL ENGINEERING AND MECHANICS 2005, VOLS 1 AND 2 | 2005年

关键词：

MEMS; micro fabrication; gyroscope; design;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper describes the design and microfabrication of MEMS 2D microgyroscope. The MEMS 2D microgyroscope is a resonating type of gyroscope. The primary mode is driven by electrostatic rotary comb drive. The oscillations of the secondary modes are sensed by differential capacitances detection between the circular proof mass and substrate electrodes. The micro fabrication of the 2D microgyroscope combines glass cavity etching, anodic boding of glass and SOI wafer as well as DRIE of device layer of SOI wafer. The MEMS 2D microgyroscope can be widely applied in navigation systems, IMU, automobiles and high-end consumer electronics.

引用

页码：71 / 74

页数：4

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