Highly sensitive ZnO nanowire CO sensors with the adsorption of Au nanoparticles

被引:160
作者
Chang, Shoou-Jinn [1 ,2 ]
Hsueh, Ting-Jen [1 ,2 ]
Chen, I-Cherng [3 ]
Huang, Bohr-Ran [4 ]
机构
[1] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Inst Microelect, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Dept Elect Engn, Tainan 70101, Taiwan
[3] Ind Technol Res Inst S, Micro Syst Technol Ctr, Tainan 709, Taiwan
[4] Natl Taiwan Univ Sci & Technol, Dept Elect Engn, Grad Inst Electroopt Engn, Taipei 106, Taiwan
关键词
D O I
10.1088/0957-4484/19/17/175502
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this study, the growth of high density single-crystalline ZnO nanowires on patterned ZnO: Ga/SiO2/Si templates was reported. We also adsorbed Au nanoparticles onto nanowire surfaces and fabricated ZnO nanowire CO sensors. With 50 ppm CO gas, it was found that we could enhance the device sensitivities at 350 degrees C from 4.2% to 46.5% by the adsorption of Au nanoparticles. It was also found that measured sensitivities were around 30%, 37%, 46.5% and 53% when concentration of the injected CO gas was 5, 20, 50 and 100 ppm, respectively.
引用
收藏
页数:5
相关论文
共 30 条
[1]   Micromachined twin gas sensor for CO and O2 quantification based on catalytically modified nano-SnO2 [J].
Belmonte, JC ;
Manzano, J ;
Arbiol, J ;
Cirera, A ;
Puigcorbé, J ;
Vilà, A ;
Sabaté, N ;
Gràcia, I ;
Cané, C ;
Morante, JR .
SENSORS AND ACTUATORS B-CHEMICAL, 2006, 114 (02) :881-892
[2]   The effects of thickness and operation temperature on ZnO:Al thin film CO gas sensor [J].
Chang, JF ;
Kuo, HH ;
Leu, IC ;
Hon, MH .
SENSORS AND ACTUATORS B-CHEMICAL, 2002, 84 (2-3) :258-264
[3]   Gas-sensing properties of sprayed films of (CdO)x(ZnO)1-x mixed oxide [J].
Ferro, R ;
Rodríguez, JA ;
Jiménez, I ;
Cirera, A ;
Cerdà, J ;
Morante, JR .
IEEE SENSORS JOURNAL, 2005, 5 (01) :48-52
[4]   ZnO nanowires by pulsed laser vaporization: Synthesis and properties [J].
Ganesan, PG ;
McGuire, K ;
Kim, H ;
Gothard, N ;
Mohan, S ;
Rao, AM ;
Ramanath, G .
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2005, 5 (07) :1125-1129
[5]   Hydrogen sensitivity of ZnO p-n homojunctions [J].
Hazra, S. K. ;
Basu, S. .
SENSORS AND ACTUATORS B-CHEMICAL, 2006, 117 (01) :177-182
[6]   Site-specific growth of Zno nanorods using catalysis-driven molecular-beam epitaxy [J].
Heo, YW ;
Varadarajan, V ;
Kaufman, M ;
Kim, K ;
Norton, DP ;
Ren, F ;
Fleming, PH .
APPLIED PHYSICS LETTERS, 2002, 81 (16) :3046-3048
[7]   Highly sensitive ZnO nanowire ethanol sensor with Pd adsorption [J].
Hsueh, Ting-Jen ;
Chang, Shoou-Jinn ;
Hsu, Cheng-Liang ;
Lin, Yan-Ru ;
Chen, I.-Cherng .
APPLIED PHYSICS LETTERS, 2007, 91 (05)
[8]   ZnO nanowire-based CO sensors prepared at various temperatures [J].
Hsueh, Ting-Jen ;
Chen, Yi-Wen ;
Chang, Shoou-Jinn ;
Wang, Sea-Fue ;
Hsu, Cheng-Liang ;
Lin, Yan-Ru ;
Lin, Tzer-Shen ;
Chen, I-Cherng .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2007, 154 (12) :J393-J396
[9]   A novel method for the formation of ladder-like ZnO nanowires [J].
Hsueh, Ting-Jen ;
Chang, Shoou-Jinn ;
Lin, Yan-Ru ;
Tsai, Song-Yeu ;
Chen, I-Cherng ;
Hsu, Cheng-Liang .
CRYSTAL GROWTH & DESIGN, 2006, 6 (06) :1282-1284
[10]   ZnO nanoparticle-modified infrared internal reflection elements for selective detection of volatile organic compounds [J].
Huang, GG ;
Wang, CT ;
Tang, HT ;
Huang, YS ;
Yang, J .
ANALYTICAL CHEMISTRY, 2006, 78 (07) :2397-2404