Nonlinear forced oscillations of piezoelectric resonators

Forced oscillations of piezoelectric, micro-electromechanical (MEMS) resonators fabricated as clamped-clamped composite structures are studied in this effort. Piezoelectric actuation is used to excite these structures on the input side and piezoelectric sensing is carried out on the output side. Each resonator structure is modeled as an Euler-Bernoulli beam with axially varying properties across the length and distributed actuation. A nonlinear integro-partial differential system is derived to describe the micro-resonator. For weak damping and weak forcing, the method of multiple scales is used to obtain an approximate solution of the system about a post-buckling position. The different modeling assumptions are presented and discussed, and the analytical prediction is compared with experimental observation.