Precision thickness measurement of ultra-thin films via XPS

被引：8
作者：
Geng, SJ
Zhang, S
Onishi, H
机构：
[1] Nanyang Technol Univ, Sch Mech & Prod Engn, Singapore 639798, Singapore
[2] Shimadza Asia Pacific Pte Ltd, Singapore 118227, Singapore
来源：
ADVANCED MATERIALS PROCESSING II | 2003年 / 437-4卷
关键词：
applications; ESCA; thickness measurement; ultra-thin films; XPS;
D O I：
10.4028/www.scientific.net/MSF.437-438.195
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
XPS (X-ray Photoelectron Spectroscopy) or ESCA (Electron Spectroscopy for Chemical Analysis) can accurately measure the thickness of ultra-thin films thinner than 2 rim and its precision is +/- 0.1nm. XPS remedy the defection of TEM that is difficult to determine the thickness for films thinner than 1 rim, but XPS is not accurate for films thicker than 10 rim. This paper aims at reviewing the application of XPS in determining thickness of ultra-thin films.
引用
收藏
页码：195 / 198
页数：4
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