Precision thickness measurement of ultra-thin films via XPS

被引：8

作者：

Geng, SJ

Zhang, S

Onishi, H

机构：

[1] Nanyang Technol Univ, Sch Mech & Prod Engn, Singapore 639798, Singapore

[2] Shimadza Asia Pacific Pte Ltd, Singapore 118227, Singapore

来源：

ADVANCED MATERIALS PROCESSING II | 2003年 / 437-4卷

关键词：

applications; ESCA; thickness measurement; ultra-thin films; XPS;

D O I：

10.4028/www.scientific.net/MSF.437-438.195

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

XPS (X-ray Photoelectron Spectroscopy) or ESCA (Electron Spectroscopy for Chemical Analysis) can accurately measure the thickness of ultra-thin films thinner than 2 rim and its precision is +/- 0.1nm. XPS remedy the defection of TEM that is difficult to determine the thickness for films thinner than 1 rim, but XPS is not accurate for films thicker than 10 rim. This paper aims at reviewing the application of XPS in determining thickness of ultra-thin films.

引用

收藏

页码：195 / 198

页数：4

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