Lithography-free, self-aligned inkjet printing with sub-hundred-nanometer resolution

被引：258

作者：

Sele, CW

von Werne, T

Friend, RH

Sirringhaus, H

机构：

[1] Univ Cambridge, Cavendish Lab, Cambridge CB03 0HE, England

[2] Plast Log Ltd, Cambridge CB4 0FX, England

来源：

ADVANCED MATERIALS | 2005年 / 17卷 / 08期

关键词：

D O I：

10.1002/adma.200401285

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Direct inkjet printing of sub-100 nm nanoscale gaps, without the need for any high-resolution lithography, is made possible by a novel self-aligned printing method (see Figure). The benefits of this method are demonstrated by fabrication of all-polymer transistor circuits, which exhibit switching speeds at least two orders of magnitude higher than those previously reported for inkjet-printed polymer devices.

引用

页码：997 / +

页数：6

共 25 条

[1] Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography
Austin, MD
Chou, SY
[J]. APPLIED PHYSICS LETTERS, 2002, 81 (23) : 4431 - 4433
[2] Pentacene-based radio-frequency identification circuitry
Baude, PF
Ender, DA
Haase, MA
Kelley, TW
Muyres, DV
Theiss, SD
[J]. APPLIED PHYSICS LETTERS, 2003, 82 (22) : 3964 - 3966
[3] MOTIONS OF DROPLETS ON SOLID-SURFACES INDUCED BY CHEMICAL OR THERMAL-GRADIENTS
BROCHARD, F
[J]. LANGMUIR, 1989, 5 (02) : 432 - 438
[4] Noncontact potentiometry of polymer field-effect transistors
Bürgi, L
Sirringhaus, H
Friend, RH
[J]. APPLIED PHYSICS LETTERS, 2002, 80 (16) : 2913 - 2915
[5] High-stability ultrathin spin-on benzocyclobutene gate dielectric for polymer field-effect transistors
Chua, LL
Ho, PKH
Sirringhaus, H
Friend, RH
[J]. APPLIED PHYSICS LETTERS, 2004, 84 (17) : 3400 - 3402
[6] A simplified method for predicting the dynamic surface tension of concentrated surfactant solutions
Daniel, RC
Berg, JC
[J]. JOURNAL OF COLLOID AND INTERFACE SCIENCE, 2003, 260 (01) : 244 - 249
[7] Inkjet printing of polymers: State of the art and future developments
de Gans, BJ
Duineveld, PC
Schubert, US
[J]. ADVANCED MATERIALS, 2004, 16 (03) : 203 - 213
[8] PLASMA-ETCHING OF ORGANIC MATERIALS .1. POLYIMIDE IN O2-CF4
EGITTO, FD
EMMI, F
HORWATH, RS
VUKANOVIC, V
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (03): : 893 - 904
[9] Fast polymer integrated circuits
Fix, W
Ullmann, A
Ficker, J
Clemens, W
[J]. APPLIED PHYSICS LETTERS, 2002, 81 (09) : 1735 - 1737
[10] The path to ubiquitous and low-cost organic electronic appliances on plastic
Forrest, SR
[J]. NATURE, 2004, 428 (6986) : 911 - 918

← 1 2 3 →