Multifrequential AC modeling of the SThM probe behavior

被引:18
作者
Grossel, Philippe [1 ]
Raphaeel, Olivier [1 ]
Depasse, Francoise [1 ]
Duvaut, Thierry [1 ]
Trannoy, Nathalie [1 ]
机构
[1] Univ Reims, Lab Engn & Opt, Unite Therm & Anal Phys, EA 3802, F-51687 Reims 2, France
关键词
scanning thermal microscopy; 3 omega method; thermal modeling;
D O I
10.1016/j.ijthermalsci.2006.12.004
中图分类号
O414.1 [热力学];
学科分类号
摘要
The scanning thermal microscope is of current use for the determination of the thermal conductivity of material surfaces, with a submicrometer resolution. The determination of the parameters that have great importance in the probe response is clarified and an analytical approach in the multifrequency domain is compared with a finite element method and experimental results without contact. (c) 2007 Elsevier Masson SAS. All rights reserved.
引用
收藏
页码:980 / 988
页数:9
相关论文
共 17 条
[1]   Data reduction in 3ω method for thin-film thermal conductivity determination [J].
Borca-Tasciuc, T ;
Kumar, AR ;
Chen, G .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2001, 72 (04) :2139-2147
[2]   THERMAL-CONDUCTIVITY MEASUREMENT FROM 30-K TO 750-K - THE 3-OMEGA METHOD [J].
CAHILL, DG .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (02) :802-808
[3]  
Carslaw H. S., 1965, CONDUCTION HEAT SOLI
[4]   1ω, 2ω, and 3ω methods for measurements of thermal properties -: art. no. 124902 [J].
Dames, C ;
Chen, G .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2005, 76 (12) :1-14
[5]  
Depasse F, 2004, SUPERLATTICE MICROST, V35, P269, DOI 10.1016/j.spmi.2003.01.008
[6]   Quantitative thermal conductivity measurements with nanometre resolution [J].
Fiege, GBM ;
Altes, A ;
Heiderhoff, B ;
Balk, LJ .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1999, 32 (05) :L13-L17
[7]   DC scanning thermal microscopy: Characterisation and interpretation of the measurement [J].
Gomes, S ;
Trannoy, N ;
Grossel, P ;
Depasse, F ;
Bainier, C ;
Charraut, D .
INTERNATIONAL JOURNAL OF THERMAL SCIENCES, 2001, 40 (11) :949-958
[8]  
Gomes S., 1999, THESIS U REIMS
[9]   Thermal multilayer and continuous thermophysical profiles: The recursive approach. [J].
Grossel, P ;
Depasse, F ;
Trannoy, N .
JOURNAL DE PHYSIQUE III, 1997, 7 (01) :13-33
[10]  
HENRY JF, 2003, C SOC FRANC THERM