Efficient, tunable flip-chip-integrated III-V/Si hybrid external-cavity laser array

被引：46

作者：

Lin, Shiyun ^{[1
]}

Zheng, Xuezhe ^{[1
]}

Yao, Jin ^{[1
]}

Djordjevic, Stevan S. ^{[1
]}

Cunningham, John E. ^{[1
]}

Lee, Jin-Hyoung ^{[1
]}

Shubin, Ivan ^{[1
]}

Luo, Ying ^{[1
]}

Bovington, Jock ^{[1
]}

Lee, Daniel Y. ^{[1
]}

Thacker, Hiren D. ^{[1
]}

Raj, Kannan ^{[1
]}

Krishnamoorthy, Ashok V. ^{[1
]}

机构：

[1] Oracle Networking Grp, 9515 Towne Ctr Dr, San Diego, CA 92121 USA

来源：

OPTICS EXPRESS | 2016年 / 24卷 / 19期

关键词：

SILICON; POWER; COMPACT;

D O I：

10.1364/OE.24.021454

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate a surface-normal coupled tunable hybrid silicon laser array for the first time using passively-aligned, high-accuracy flip chip bonding. A 2x6 III-V reflective semiconductor optical amplifier (RSOA) array with integrated total internal reflection mirrors is bonded to a CMOS SOI chip with grating couplers and silicon ring reflectors to form a tunable hybrid external-cavity laser array. Waveguide-coupled wall plug efficiency (wcWPE) of 2% and output power of 3 mW has been achieved for all 12 lasers. We further improved the performance by reducing the thickness of metal/dielectric stacks and achieved 10mW output power and 5% wcWPE with the same integration techniques. This non-invasive, one-step back end of the line (BEOL) integration approach provides a promising solution to high density laser sources for future large-scale photonic integrated circuits. (C) 2016 Optical Society of America

引用

页码：21454 / 21462

页数：9

共 28 条

[1]

Bowers J, 2010, OPT PHOTONICS NEWS, V21, P28, DOI 10.1364/OPN.21.5.000028

[2]

Contu P, 2014, IEEE PHOTON CONF, P258, DOI 10.1109/IPCon.2014.6995384

[3] Highly-efficient thermally-tuned resonant optical filters [J].

Cunningham, John E. ;

Shubin, Ivan ;

Zheng, Xuezhe ;

Pinguet, Thierry ;

Mekis, Attila ;

Luo, Ying ;

Thacker, Hiren ;

Li, Guoliang ;

Yao, Jin ;

Raj, Kannan ;

Krishnamoorthy, Ashok V. .

OPTICS EXPRESS, 2010, 18 (18) :19055-19063

[4] Transfer-printing-based integration of single-mode waveguide-coupled III-V-on-silicon broadband light emitters [J].

De Groote, Andreas ;

Cardile, Paolo ;

Subramanian, Ananth Z. ;

Fecioru, Alin M. ;

Bower, Christopher ;

Delbeke, Danae ;

Baets, Roel ;

Roelkens, Gunther .

OPTICS EXPRESS, 2016, 24 (13) :13754-13762

[5]

DeDobbelaere P., 2014, P EUR C OPT COMM

[6] Ultra compact 45 GHz CMOS compatible Germanium waveguide photodiode with low dark current [J].

DeRose, Christopher T. ;

Trotter, Douglas C. ;

Zortman, William A. ;

Starbuck, Andrew L. ;

Fisher, Moz ;

Watts, Michael R. ;

Davids, Paul S. .

OPTICS EXPRESS, 2011, 19 (25) :24897-24904

[7] Electrically pumped hybrid AlGaInAs-silicon evanescent laser [J].

Fang, Alexander W. ;

Park, Hyundai ;

Cohen, Oded ;

Jones, Richard ;

Paniccia, Mario J. ;

Bowers, John E. .

OPTICS EXPRESS, 2006, 14 (20) :9203-9210

[8] Compact and Low Power Consumption Hybrid Integrated Wavelength Tunable Laser Module Using Silicon Waveguide Resonators [J].

Fujioka, Nobuhide ;

Chu, Tao ;

Ishizaka, Masashige .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 2010, 28 (21) :3115-3120

[9] Demonstration of a heterogeneously integrated III-V/SOI single wavelength tunable laser [J].

Keyvaninia, Shahram ;

Roelkens, Gunther ;

Van Thourhout, Dries ;

Jany, Christophe ;

Lamponi, Marco ;

Le Liepvre, Alban ;

Lelarge, Francois ;

Make, Dalila ;

Duan, Guang-Hua ;

Bordel, Damien ;

Fedeli, Jean-Marc .

OPTICS EXPRESS, 2013, 21 (03) :3784-3792

[10]

Lee J. H., 2016, OPT FIB COMM C OSA T

← 1 2 3 →