Method of excess fractions with application to absolute distance metrology: theoretical analysis

被引：42

作者：

Falaggis, Konstantinos ^{[1
]}

Towers, David P. ^{[1
]}

Towers, Catherine E. ^{[1
]}

机构：

[1] Univ Leeds, Sch Mech Engn, Leeds LS2 9JT, W Yorkshire, England

来源：

APPLIED OPTICS | 2011年 / 50卷 / 28期

基金：

英国工程与自然科学研究理事会;

关键词：

GRATING PROJECTION PROFILOMETRY; PHASE-SHIFTING INTERFEROMETRY; FEMTOSECOND PULSE LASER; SHAPE MEASUREMENT; EXTENDED RANGE; FRINGE; SELECTION; COMB; LONG;

D O I：

10.1364/AO.50.005484

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The method of excess fractions (EF) is well established to resolve the fringe order ambiguity generated in interferometric detection. Despite this background, multiwavelength interferometric absolute long distance measurements have only been reported with varying degrees of success. In this paper we present a theoretical model that can predict the unambiguous measurement range in EF based on the selected measurement wavelengths and phase noise. It is shown that beat wavelength solutions are a subset of this theoretical model. The performance of EF, for a given phase noise, is shown to be equivalent to beat techniques but offers many alternative sets of measurement wavelengths and therefore EF offer significantly greater flexibility in experimental design. (C) 2011 Optical Society of America

引用

页码：5484 / 5498

页数：15

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