Poly-ols Based Sol-Gel Synthesis of Zinc Oxide Thin Films

被引：1

作者：

Naik, Gururaj V. ^{[1
,2
]}

Bhat, Navakanta ^{[3
]}

机构：

[1] Purdue Univ, Sch Elect & Comp Engn, W Lafayette, IN 47907 USA

[2] Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USA

[3] Indian Inst Sci, Dept Elect Commun Engn, Bangalore 560012, Karnataka, India

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 2011年 / 158卷 / 02期

关键词：

ZNO FILMS; TRANSISTORS; PERFORMANCE;

D O I：

10.1149/1.3515894

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

We demonstrate that the structural and optical properties of a sol-gel deposited zinc oxide thin film can be tuned by varying the composition of the sol, consisting of ethylene glycol and glycerol. A systematic study of the effect of the composition of sol on the mean grain size, thickness, and defect density of the zinc oxide film is presented. About 20% glycerol content in the sol is observed to improve the quality of the film, as evaluated by X-ray diffraction and photoluminescence studies. Thus, optimizing the composition of the sol for about 60 nm thick ZnO film using 20% glycerol resulted in the zinc oxide film that is about 80% transparent in visible spectrum, exhibiting electrical resistivity of about 18 Omega cm and field-effect mobility of 0.78 cm(2)/(V s). (C) 2010 The Electrochemical Society. [DOI: 10.1149/1.3515894] All rights reserved.

引用

页码：H85 / H87

页数：3

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