共 60 条
Zinc oxide obtained by the solvothermal method with high sensitivity and selectivity to nitrogen dioxide
被引:30
作者:

Nagornov, I. A.
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机构:
Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, 31 Leninsky Prospect, Moscow 119991, Russia
D Mendeleev Univ Chem Technol Russia, Miusskaya Sq 9, Moscow 125047, Russia Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, 31 Leninsky Prospect, Moscow 119991, Russia

Mokrushin, A. S.
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机构:
Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, 31 Leninsky Prospect, Moscow 119991, Russia Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, 31 Leninsky Prospect, Moscow 119991, Russia

Simonenko, E. P.
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机构:
Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, 31 Leninsky Prospect, Moscow 119991, Russia Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, 31 Leninsky Prospect, Moscow 119991, Russia

Simonenko, N. P.
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机构:
Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, 31 Leninsky Prospect, Moscow 119991, Russia Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, 31 Leninsky Prospect, Moscow 119991, Russia

Gorobtsov, Ph Yu
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机构:
Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, 31 Leninsky Prospect, Moscow 119991, Russia Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, 31 Leninsky Prospect, Moscow 119991, Russia

Sevastyanov, V. G.
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h-index: 0
机构:
Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, 31 Leninsky Prospect, Moscow 119991, Russia Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, 31 Leninsky Prospect, Moscow 119991, Russia

Kuznetsov, N. T.
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h-index: 0
机构:
Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, 31 Leninsky Prospect, Moscow 119991, Russia Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, 31 Leninsky Prospect, Moscow 119991, Russia
机构:
[1] Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, 31 Leninsky Prospect, Moscow 119991, Russia
[2] D Mendeleev Univ Chem Technol Russia, Miusskaya Sq 9, Moscow 125047, Russia
基金:
俄罗斯基础研究基金会;
关键词:
Nanoparticles;
Zinc oxide;
Acetylacetonate;
Gas sensors;
NO2;
GAS-SENSING PROPERTIES;
2D ZNO NANOWALLS;
THIN-FILM;
SENSORS;
NANOSHEETS;
HUMIDITY;
NO2;
MORPHOLOGIES;
TEMPERATURE;
PERFORMANCE;
D O I:
10.1016/j.ceramint.2019.11.279
中图分类号:
TQ174 [陶瓷工业];
TB3 [工程材料学];
学科分类号:
0805 ;
080502 ;
摘要:
The effect of heat treatment using [Zn(H2O)(O2C5H7)(2)] precursor ethylene glycol solution (synthesis temperature 125-185 degrees C, holding time 2-6 h) on the characteristics of the obtained nanocrystalline zinc oxide powder was studied. Under all synthesis conditions crystalline ZnO was formed with a wurtzite structure and an average crystallite size of 8-37 nm. The thermal behaviour and microstructure of the nanostructured ZnO powder were studied. The sensory properties of the obtained films in terms of the detection of hydrogen, methane, carbon monoxide and nitrogen dioxide were studied. The high sensitivity and selectivity of a thick ZnO film (synthesis temperature 145 degrees C, holding time 6 h) when detecting NO2 was established. It was found, that humidity had almost no effect on response value for NO2 detection.
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收藏
页码:7756 / 7766
页数:11
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[1]
Fabrication of ZnO Thin-Film Transistors by Chemical Vapor Deposition Method using Zinc Acetate Solution
[J].
Alias, Afishah
;
Hazawa, Kouta
;
Kawashima, Nobuaki
;
Fukuda, Hisashi
;
Uesugi, Katsuhiro
.
JAPANESE JOURNAL OF APPLIED PHYSICS,
2011, 50 (01)

论文数: 引用数:
h-index:
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Hazawa, Kouta
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机构:
Muroran Inst Technol, Fac Engn, Div Engn Composite Funct, Muroran, Hokkaido 0508585, Japan Muroran Inst Technol, Fac Engn, Div Engn Composite Funct, Muroran, Hokkaido 0508585, Japan

Kawashima, Nobuaki
论文数: 0 引用数: 0
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Muroran Inst Technol, Fac Engn, Div Engn Composite Funct, Muroran, Hokkaido 0508585, Japan Muroran Inst Technol, Fac Engn, Div Engn Composite Funct, Muroran, Hokkaido 0508585, Japan

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论文数: 0 引用数: 0
h-index: 0
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Muroran Inst Technol, Fac Engn, Div Engn Composite Funct, Muroran, Hokkaido 0508585, Japan Muroran Inst Technol, Fac Engn, Div Engn Composite Funct, Muroran, Hokkaido 0508585, Japan

Uesugi, Katsuhiro
论文数: 0 引用数: 0
h-index: 0
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Muroran Inst Technol, Fac Engn, Div Engn Composite Funct, Muroran, Hokkaido 0508585, Japan Muroran Inst Technol, Fac Engn, Div Engn Composite Funct, Muroran, Hokkaido 0508585, Japan
[2]
The double role of p-toluenesulfonic acid in the formation of ZnO particles with different morphologies
[J].
Ambrozic, Gabriela
;
Djerdj, Igor
;
Skapin, Sreco D.
;
Zigon, Majda
;
Orel, Zorica Crnjak
.
CRYSTENGCOMM,
2010, 12 (06)
:1862-1868

Ambrozic, Gabriela
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Inst Chem, SI-1000 Ljubljana, Slovenia Natl Inst Chem, SI-1000 Ljubljana, Slovenia

Djerdj, Igor
论文数: 0 引用数: 0
h-index: 0
机构:
Rudjer Boskovic Inst, Zagreb 10000, Croatia
ETH, Dept Mat, Lab Multifunct Mat, CH-8093 Zurich, Switzerland Natl Inst Chem, SI-1000 Ljubljana, Slovenia

Skapin, Sreco D.
论文数: 0 引用数: 0
h-index: 0
机构:
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Zigon, Majda
论文数: 0 引用数: 0
h-index: 0
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Natl Inst Chem, SI-1000 Ljubljana, Slovenia Natl Inst Chem, SI-1000 Ljubljana, Slovenia

Orel, Zorica Crnjak
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Inst Chem, SI-1000 Ljubljana, Slovenia Natl Inst Chem, SI-1000 Ljubljana, Slovenia
[3]
Quantum-sized ZnO nanoparticles: Synthesis, characterization and sensing properties for NO2
[J].
Bai, Shouli
;
Hu, Jingwei
;
Li, Dianqing
;
Luo, Ruixian
;
Chen, Aifan
;
Liu, Chung Chiun
.
JOURNAL OF MATERIALS CHEMISTRY,
2011, 21 (33)
:12288-12294

Bai, Shouli
论文数: 0 引用数: 0
h-index: 0
机构:
Beijing Univ Chem Technol, State Key Lab Chem Resource Engn, Beijing 100029, Peoples R China Beijing Univ Chem Technol, State Key Lab Chem Resource Engn, Beijing 100029, Peoples R China

Hu, Jingwei
论文数: 0 引用数: 0
h-index: 0
机构:
Beijing Univ Chem Technol, State Key Lab Chem Resource Engn, Beijing 100029, Peoples R China Beijing Univ Chem Technol, State Key Lab Chem Resource Engn, Beijing 100029, Peoples R China

Li, Dianqing
论文数: 0 引用数: 0
h-index: 0
机构:
Beijing Univ Chem Technol, State Key Lab Chem Resource Engn, Beijing 100029, Peoples R China Beijing Univ Chem Technol, State Key Lab Chem Resource Engn, Beijing 100029, Peoples R China

Luo, Ruixian
论文数: 0 引用数: 0
h-index: 0
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Beijing Univ Chem Technol, State Key Lab Chem Resource Engn, Beijing 100029, Peoples R China Beijing Univ Chem Technol, State Key Lab Chem Resource Engn, Beijing 100029, Peoples R China

Chen, Aifan
论文数: 0 引用数: 0
h-index: 0
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Beijing Univ Chem Technol, State Key Lab Chem Resource Engn, Beijing 100029, Peoples R China Beijing Univ Chem Technol, State Key Lab Chem Resource Engn, Beijing 100029, Peoples R China

Liu, Chung Chiun
论文数: 0 引用数: 0
h-index: 0
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Case Western Reserve Univ, Dept Chem Engn, Cleveland, OH 44106 USA Beijing Univ Chem Technol, State Key Lab Chem Resource Engn, Beijing 100029, Peoples R China
[4]
MODIFIED HETEROJUNCTION BASED ON ZINC-OXIDE THIN-FILM FOR HYDROGEN GAS-SENSOR APPLICATION
[J].
BASU, S
;
DUTTA, A
.
SENSORS AND ACTUATORS B-CHEMICAL,
1994, 22 (02)
:83-87

BASU, S
论文数: 0 引用数: 0
h-index: 0
机构: Semiconductor Preparation and Processing Laboratory, Materials Science Centre, Indian Institute of Technology, Kharagpur

DUTTA, A
论文数: 0 引用数: 0
h-index: 0
机构: Semiconductor Preparation and Processing Laboratory, Materials Science Centre, Indian Institute of Technology, Kharagpur
[5]
Effective detection of trace amount of explosive nitro-compounds by ZnO nanofibers with hollow structure
[J].
Cao, Yang
;
Zou, Xiaoxin
;
Wang, Xue
;
Qian, Jingyu
;
Bai, Ni
;
Li, Guo-Dong
.
SENSORS AND ACTUATORS B-CHEMICAL,
2016, 232
:564-570

Cao, Yang
论文数: 0 引用数: 0
h-index: 0
机构:
Jilin Univ, Coll Chem, Int Joint Res Lab Nanomicro Architecture Chem, State Key Lab Inorgan Synth & Preparat Chem, 2699 Qianjin St, Changchun 130012, Peoples R China Jilin Univ, Coll Chem, Int Joint Res Lab Nanomicro Architecture Chem, State Key Lab Inorgan Synth & Preparat Chem, 2699 Qianjin St, Changchun 130012, Peoples R China

Zou, Xiaoxin
论文数: 0 引用数: 0
h-index: 0
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Jilin Univ, Coll Chem, Int Joint Res Lab Nanomicro Architecture Chem, State Key Lab Inorgan Synth & Preparat Chem, 2699 Qianjin St, Changchun 130012, Peoples R China Jilin Univ, Coll Chem, Int Joint Res Lab Nanomicro Architecture Chem, State Key Lab Inorgan Synth & Preparat Chem, 2699 Qianjin St, Changchun 130012, Peoples R China

Wang, Xue
论文数: 0 引用数: 0
h-index: 0
机构:
Jilin Univ, Coll Chem, Int Joint Res Lab Nanomicro Architecture Chem, State Key Lab Inorgan Synth & Preparat Chem, 2699 Qianjin St, Changchun 130012, Peoples R China Jilin Univ, Coll Chem, Int Joint Res Lab Nanomicro Architecture Chem, State Key Lab Inorgan Synth & Preparat Chem, 2699 Qianjin St, Changchun 130012, Peoples R China

Qian, Jingyu
论文数: 0 引用数: 0
h-index: 0
机构:
Jilin Univ, Coll Chem, State Key Lab Supramol Struct & Materials, 2699 Qianjin St, Changchun 130012, Peoples R China Jilin Univ, Coll Chem, Int Joint Res Lab Nanomicro Architecture Chem, State Key Lab Inorgan Synth & Preparat Chem, 2699 Qianjin St, Changchun 130012, Peoples R China

Bai, Ni
论文数: 0 引用数: 0
h-index: 0
机构:
Jiangsu Univ Sci & Technol, Sch Mech & Met Engn, Zhangjiagang 215600, Peoples R China Jilin Univ, Coll Chem, Int Joint Res Lab Nanomicro Architecture Chem, State Key Lab Inorgan Synth & Preparat Chem, 2699 Qianjin St, Changchun 130012, Peoples R China

Li, Guo-Dong
论文数: 0 引用数: 0
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Jilin Univ, Coll Chem, Int Joint Res Lab Nanomicro Architecture Chem, State Key Lab Inorgan Synth & Preparat Chem, 2699 Qianjin St, Changchun 130012, Peoples R China Jilin Univ, Coll Chem, Int Joint Res Lab Nanomicro Architecture Chem, State Key Lab Inorgan Synth & Preparat Chem, 2699 Qianjin St, Changchun 130012, Peoples R China
[6]
Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering
[J].
Carcia, PF
;
McLean, RS
;
Reilly, MH
;
Nunes, G
.
APPLIED PHYSICS LETTERS,
2003, 82 (07)
:1117-1119

Carcia, PF
论文数: 0 引用数: 0
h-index: 0
机构:
DuPont Co Inc, Res & Dev, Expt Stn, Wilmington, DE 19880 USA DuPont Co Inc, Res & Dev, Expt Stn, Wilmington, DE 19880 USA

McLean, RS
论文数: 0 引用数: 0
h-index: 0
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DuPont Co Inc, Res & Dev, Expt Stn, Wilmington, DE 19880 USA DuPont Co Inc, Res & Dev, Expt Stn, Wilmington, DE 19880 USA

Reilly, MH
论文数: 0 引用数: 0
h-index: 0
机构:
DuPont Co Inc, Res & Dev, Expt Stn, Wilmington, DE 19880 USA DuPont Co Inc, Res & Dev, Expt Stn, Wilmington, DE 19880 USA

Nunes, G
论文数: 0 引用数: 0
h-index: 0
机构:
DuPont Co Inc, Res & Dev, Expt Stn, Wilmington, DE 19880 USA DuPont Co Inc, Res & Dev, Expt Stn, Wilmington, DE 19880 USA
[7]
Metrological characteristics of ZNO oxygen sensor at room temperature
[J].
Chaabouni, F
;
Abaab, M
;
Rezig, B
.
SENSORS AND ACTUATORS B-CHEMICAL,
2004, 100 (1-2)
:200-204

Chaabouni, F
论文数: 0 引用数: 0
h-index: 0
机构:
Ecole Natl Ingn Tunis, Photovolta & Semicond Mat Lab, Tunis 1002, Tunisia Ecole Natl Ingn Tunis, Photovolta & Semicond Mat Lab, Tunis 1002, Tunisia

Abaab, M
论文数: 0 引用数: 0
h-index: 0
机构:
Ecole Natl Ingn Tunis, Photovolta & Semicond Mat Lab, Tunis 1002, Tunisia Ecole Natl Ingn Tunis, Photovolta & Semicond Mat Lab, Tunis 1002, Tunisia

Rezig, B
论文数: 0 引用数: 0
h-index: 0
机构:
Ecole Natl Ingn Tunis, Photovolta & Semicond Mat Lab, Tunis 1002, Tunisia Ecole Natl Ingn Tunis, Photovolta & Semicond Mat Lab, Tunis 1002, Tunisia
[8]
Self-Assembled 3D ZnO Porous Structures with Exposed Reactive {0001} Facets and Their Enhanced Gas Sensitivity
[J].
Chang, Jin
;
Ahmad, Muhammad Z.
;
Wlodarski, Wojtek
;
Waclawik, Eric R.
.
SENSORS,
2013, 13 (07)
:8445-8460

Chang, Jin
论文数: 0 引用数: 0
h-index: 0
机构:
QUT, Sch Chem Phys & Mech Engn, Brisbane, Qld 4000, Australia QUT, Sch Chem Phys & Mech Engn, Brisbane, Qld 4000, Australia

Ahmad, Muhammad Z.
论文数: 0 引用数: 0
h-index: 0
机构:
RMIT Univ, Sch Elect & Comp Engn, Melbourne, Vic 3000, Australia QUT, Sch Chem Phys & Mech Engn, Brisbane, Qld 4000, Australia

Wlodarski, Wojtek
论文数: 0 引用数: 0
h-index: 0
机构:
RMIT Univ, Sch Elect & Comp Engn, Melbourne, Vic 3000, Australia QUT, Sch Chem Phys & Mech Engn, Brisbane, Qld 4000, Australia

Waclawik, Eric R.
论文数: 0 引用数: 0
h-index: 0
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QUT, Sch Chem Phys & Mech Engn, Brisbane, Qld 4000, Australia QUT, Sch Chem Phys & Mech Engn, Brisbane, Qld 4000, Australia
[9]
NiO-ZnO Nanoheterojunction Networks for Room-Temperature Volatile Organic Compounds Sensing
[J].
Chen, Hongjun
;
Bo, Renheng
;
Shrestha, Aabhash
;
Xin, Bobo
;
Nasiri, Noushin
;
Zhou, Jin
;
Di Bernardo, Iolanda
;
Dodd, Aaron
;
Saunders, Martin
;
Lipton-Duffin, Josh
;
White, Thomas
;
Tsuzuki, Takuya
;
Tricoli, Antonio
.
ADVANCED OPTICAL MATERIALS,
2018, 6 (22)

Chen, Hongjun
论文数: 0 引用数: 0
h-index: 0
机构:
Australian Natl Univ, Coll Engn & Comp Sci, Res Sch Engn, Nanotechnol Res Lab, Canberra, ACT 2601, Australia Australian Natl Univ, Coll Engn & Comp Sci, Res Sch Engn, Nanotechnol Res Lab, Canberra, ACT 2601, Australia

Bo, Renheng
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论文数: 0 引用数: 0
h-index: 0
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Australian Natl Univ, Coll Engn & Comp Sci, Res Sch Engn, Nanotechnol Res Lab, Canberra, ACT 2601, Australia Australian Natl Univ, Coll Engn & Comp Sci, Res Sch Engn, Nanotechnol Res Lab, Canberra, ACT 2601, Australia

论文数: 引用数:
h-index:
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Zhou, Jin
论文数: 0 引用数: 0
h-index: 0
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Australian Natl Univ, Coll Engn & Comp Sci, Res Sch Engn, Nanotechnol Res Lab, Canberra, ACT 2601, Australia Australian Natl Univ, Coll Engn & Comp Sci, Res Sch Engn, Nanotechnol Res Lab, Canberra, ACT 2601, Australia

论文数: 引用数:
h-index:
机构:

Dodd, Aaron
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Western Australia MO10, Ctr Microscopy Characterisat & Anal, 35 Stirling Highway, Perth, WA 6009, Australia Australian Natl Univ, Coll Engn & Comp Sci, Res Sch Engn, Nanotechnol Res Lab, Canberra, ACT 2601, Australia

Saunders, Martin
论文数: 0 引用数: 0
h-index: 0
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Univ Western Australia MO10, Ctr Microscopy Characterisat & Anal, 35 Stirling Highway, Perth, WA 6009, Australia Australian Natl Univ, Coll Engn & Comp Sci, Res Sch Engn, Nanotechnol Res Lab, Canberra, ACT 2601, Australia

Lipton-Duffin, Josh
论文数: 0 引用数: 0
h-index: 0
机构:
QUT, CARF, Brisbane, Qld 4000, Australia
QUT, IFE, Brisbane, Qld 4000, Australia Australian Natl Univ, Coll Engn & Comp Sci, Res Sch Engn, Nanotechnol Res Lab, Canberra, ACT 2601, Australia

论文数: 引用数:
h-index:
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Tsuzuki, Takuya
论文数: 0 引用数: 0
h-index: 0
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Australian Natl Univ, Coll Engn & Comp Sci, Res Sch Engn, Lab Adv Nanomat Sustainabil, Canberra, ACT 2601, Australia Australian Natl Univ, Coll Engn & Comp Sci, Res Sch Engn, Nanotechnol Res Lab, Canberra, ACT 2601, Australia

论文数: 引用数:
h-index:
机构:
[10]
Simple Fabrication Process for 2D ZnO Nanowalls and Their Potential Application as a Methane Sensor
[J].
Chen, Tse-Pu
;
Chang, Sheng-Po
;
Hung, Fei-Yi
;
Chang, Shoou-Jinn
;
Hu, Zhan-Shuo
;
Chen, Kuan-Jen
.
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2013, 13 (03)
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Chen, Tse-Pu
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Inst Microelect, Tainan 701, Taiwan
Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Dept Elect Engn, Tainan 701, Taiwan Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Inst Microelect, Tainan 701, Taiwan

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论文数: 0 引用数: 0
h-index: 0
机构:
Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Inst Microelect, Tainan 701, Taiwan
Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Dept Elect Engn, Tainan 701, Taiwan Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Inst Microelect, Tainan 701, Taiwan

论文数: 引用数:
h-index:
机构:

Chang, Shoou-Jinn
论文数: 0 引用数: 0
h-index: 0
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Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Inst Microelect, Tainan 701, Taiwan
Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Dept Elect Engn, Tainan 701, Taiwan Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Inst Microelect, Tainan 701, Taiwan

Hu, Zhan-Shuo
论文数: 0 引用数: 0
h-index: 0
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Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Inst Microelect, Tainan 701, Taiwan
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Chen, Kuan-Jen
论文数: 0 引用数: 0
h-index: 0
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Natl Cheng Kung Univ, Instrument Ctr, Tainan 701, Taiwan Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Inst Microelect, Tainan 701, Taiwan