Ge-Photodetectors for Si-Based Optoelectronic Integration

被引:214
作者
Wang, Jian [1 ]
Lee, Sungjoo [1 ]
机构
[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore
关键词
germanium; photodetector; Si photonics; I-N PHOTODETECTORS; DARK-CURRENT SUPPRESSION; HIGH-SPEED; HIGH-PERFORMANCE; WAVE-GUIDE; GERMANIUM PHOTODETECTOR; BUFFER; BANDWIDTH; DETECTOR; LAYERS;
D O I
10.3390/s110100696
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
High speed photodetectors are a key building block, which allow a large wavelength range of detection from 850 nm to telecommunication standards at optical fiber band passes of 1.3-1.55 mu m. Such devices are key components in several applications such as local area networks, board to board, chip to chip and intrachip interconnects. Recent technological achievements in growth of high quality SiGe/Ge films on Si wafers have opened up the possibility of low cost Ge-based photodetectors for near infrared communication bands and high resolution spectral imaging with high quantum efficiencies. In this review article, the recent progress in the development and integration of Ge-photodetectors on Si-based photonics will be comprehensively reviewed, along with remaining technological issues to be overcome and future research trends.
引用
收藏
页码:696 / 718
页数:23
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