Modeling of a piezo-actuated positioning stage based on hysteresis observer

被引：0

作者：

Lin, CJ ^{[1
]}

Yang, SR ^{[1
]}

机构：

[1] Da Yeh Univ, Dept Mech & Automat Engn, Changhua, Taiwan

来源：

PROCEEDINGS OF THE IASTED INTERNATIONAL CONFERENCE ON APPLIED SIMULATION AND MODELLING | 2004年

关键词：

hysteresis modeling; observer; tracking;

D O I：

暂无

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

The piezo-actuated positioning stages contain two parts: Piezo Electric Actuator (PEA) and positioning mechanism. The tracking control accuracy of the piezo-actuated positioning stage is limited due to hysteretic nonlinearity of the PEA and friction behavior of the positioning mechanism. This loss in precision restricts the use of the piezo-actuated stage in ultra-high-precision optical system. This paper presents an inversion-based approach to compensate the nonlinearity of the PEA by the proposed hysteresis observer. To compensate the degrading of precision due to friction behavior of the positioning mechanism, a PI feedback controller with feed-forward controller based on the hysteresis observer is proposed to solve tracking problems with modelling uncertainties and external disturbances.

引用

页码：546 / 551

页数：6

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