Characterization of micromachined CMOS transmission lines for RF communications

被引：0
|
作者：
Ozgur, M [1 ]
Milanovic, V [1 ]
Zincke, C [1 ]
Zaghloul, ME [1 ]
机构：
[1] George Washington Univ, Dept Elect Engn & Comp Sci, Washington, DC 20052 USA
来源：
ISCAS '98 - PROCEEDINGS OF THE 1998 INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOLS 1-6 | 1998年
关键词：
D O I：
暂无
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
This work reports on the analytical and experimental characterization of micromachined microwave transmission lines used in RF communication applications. New analytic approximations are derived for the quasi-static capacitance of coplanar transmission lines with finite metalization thickness. The expressions are well suited for CAD applications since they are compact and scalable. Furthermore, their accuracy is comparable with the fabrication tolerances and measurement accuracy achievable.
引用
收藏
页码：C353 / C356
页数：4
相关论文
共 50 条
  • [1] Micromachined RF transmission lines and resonators
    Strohm, KM
    Schmückle, FJ
    Schauwecker, B
    Heinrich, W
    Luy, JF
    FREQUENZ, 2003, 57 (3-4) : 62 - 69
  • [2] Micromachined microwave transmission lines in CMOS technology
    Milanovic, V.
    Gaitan, M.
    Bowen, E.D.
    Zaghloul, M.E.
    IEEE Transactions on Microwave Theory and Techniques, 1997, 45 (5 /1): : 630 - 635
  • [3] Micromachined microwave transmission lines in CMOS technology
    Milanovic, V
    Gaitan, M
    Bowen, ED
    Zaghloul, ME
    IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1997, 45 (05) : 630 - 635
  • [4] Micromachined microwave transmission lines by commercial CMOS fabrication
    Milanovic, V
    Gaitan, M
    Bowen, ED
    Zaghloul, ME
    PROCEEDINGS OF THE 39TH MIDWEST SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOLS I-III, 1996, : 1189 - 1192
  • [5] Optimization of backside micromachined CMOS inductors for RF applications
    Ozgur, M
    Zaghloul, ME
    Gaitan, M
    ISCAS 2000: IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS - PROCEEDINGS, VOL V: EMERGING TECHNOLOGIES FOR THE 21ST CENTURY, 2000, : 185 - 188
  • [6] Characterization of micromachined transmission lines using MRTD (multiresolution time domain technique)
    Bushyager, N
    Tentzeris, MM
    2000 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3, 2000, : 251 - 254
  • [7] Characterization of micromachined transmission lines using MRTD (multiresolution time domain technique)
    Bushyager, Nathan
    Tentzeris, Manos M.
    IEEE MTT-S International Microwave Symposium Digest, 2000, 1 : 251 - 254
  • [8] Micromachined high-performance RF passives in CMOS substrate
    Li, Xinxin
    Ni, Zao
    Gu, Lei
    Wu, Zhengzheng
    Yang, Chen
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2016, 26 (11)
  • [9] Micromachined coplanar transmission lines in a GaAs technology
    Dupuis, O
    Carbonell, J
    Mounaix, P
    Vanbésien, O
    Lippens, D
    MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 1999, 20 (02) : 106 - 110
  • [10] Micromachined rectangular-coaxial transmission lines
    Reid, J. Robert
    Marsh, Eric D.
    Webster, Richard T.
    IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2006, 54 (08) : 3433 - 3442
12345