Preparation of (001) oriented Pb(Zr,Ti)O3 thin films and their piezoelectric applications

被引：0
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作者：
Fujii, E. [1 ]
Takayama, R. [2 ]
Nomura, K. [2 ]
Murata, A. [2 ]
Hirasawa, T. [2 ]
Tomozawa, A. [2 ]
Fujii, S. [2 ]
Kamada, T. [2 ]
Torii, H. [2 ]
机构：
[1] Matsushita Elect Ind Co Ltd, Adv Technol Res Labs, 3-4 Hikaridai, Seika, Kyoto 6190237, Japan
[2] Matsushita Elect Ind Co Ltd, Adv Devices Dev Ctr, Moriguchi, Osaka 570, Japan
来源：
2007 SIXTEENTH IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS, VOLS 1 AND 2 | 2007年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Preparation of (001) oriented Pb(Zr,Ti)O-3 (PZT) thin films and their applications to a sensor and actuators were investigated. The (001) oriented PZT thin films were epitaxicially grown on (100)Pt/(100)MgO single crystal substrates by rf-magnetron sputtering. The PZT thin films on (100)Pt/(100)MgO buffer layer/glass substrates and (111)Pt/Ti/Si substrates also had high (001) orientation. All of these thin films showed the excellent piezoelectric properties without a poling treatment. These PZT thin films were applied to the angular rate sensor with a tuning fork for a car navigation system, the dual-stage actuator for positioning a magnetic head of high-density hard disk drive (HDD) and the actuator for a inkjet printer head.
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页码：700 / +
页数：2
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