Far-infrared dielectric constant of porous silicon layers measured by terahertz time-domain spectroscopy

被引:36
作者
Labbe-Lavigne, S [1 ]
Barret, S
Garet, F
Duvillaret, L
Coutaz, JL
机构
[1] Univ Savoie, Lab Hyperfrequences & Caracterisat, F-73376 Le Bourget Lac, France
[2] Univ Grenoble 1, Spectrometrie Phys Lab, CNRS, UMR 5588, F-38402 St Martin Dheres, France
关键词
D O I
10.1063/1.367467
中图分类号
O59 [应用物理学];
学科分类号
摘要
We measure the refractive index and the absorption of porous silicon layers in the millimetric and submillimetric wavelength range using the terahertz time-domain spectroscopy technique. For the studied range of porosity (55%-76%), the refractive index of porous silicon is rather well described by mixture theories, in which the refractive index of bulk silicon enters as a main parameter. (C) 1998 American Institute of Physics. [S0021-8979(98)07311-3].
引用
收藏
页码:6007 / 6010
页数:4
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