CHARACTERIZATION OF CMOS-MEMS RESONATOR BY PULSED MODE ELECTROSTATIC ACTUATION

被引：2

作者：

Munoz-Gamarra, J. L. ^{[1
]}

Marigo, E. ^{[1
]}

Giner, J. ^{[1
]}

Uranga, A. ^{[1
]}

Torres, F. ^{[1
]}

Barniol, N. ^{[1
]}

机构：

[1] Univ Autonoma Barcelona, Dept Elect Engn, E-08193 Barcelona, Spain

来源：

2010 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS) | 2010年

关键词：

OSCILLATOR; CIRCUIT;

D O I：

10.1109/FREQ.2010.5556300

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Experimental results of a pulsed mode electrostatic excitation on a Double Ended Tunning Fork (DETF) MEMS resonator at 11 MHz fabricated on a commercial standard 0.35um CMOS technology are described. Using small pulse widths of 4 ns, a ten percent power safe and a reduction of the MEMS non-linearities are achieved.

引用

页码：415 / 418

页数：4

共 15 条

[1] Future of microelectromechanical systems (MEMS) [J].

Bao, MH ;

Wang, WY .

SENSORS AND ACTUATORS A-PHYSICAL, 1996, 56 (1-2) :135-141

[2]

Brand O., 2005, CMOS-MEMS

[3]

Caplain E, 2004, ULTRASON, P323

[4] Actuation of resonant MEMS using short pulsed forces [J].

Colinet, É ;

Juillard, J ;

Guessab, S ;

Kielbasa, R .

SENSORS AND ACTUATORS A-PHYSICAL, 2004, 115 (01) :118-125

[5] Analysis of the Σ-Δ pulsed digital oscillator for MEMS [J].

Domínguez, M ;

Pons-Nin, J ;

Ricart, J ;

Bermejo, A ;

Costa, EF ;

Morata, M .

IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS I-REGULAR PAPERS, 2005, 52 (11) :2286-2297

[6] Phase noise in capacitively coupled micromechanical oscillators [J].

Kaajakari, V ;

Koskinen, JK ;

Mattila, T .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2005, 52 (12) :2322-2331

[7]

Lee S, 2003, P IEEE INT FREQ CONT, P341

[8] A CMOS-MEMS RF-Tunable Bandpass Filter Based on Two High-Q 22-MHz Polysilicon Clamped-Clamped Beam Resonators [J].

Lluis Lopez, Joan ;

Verd, Jaume ;

Uranga, Arantxa ;

Giner, Joan ;

Murillo, Gonzalo ;

Torres, Francesc ;

Abadal, Gabriel ;

Barniol, Nuria .

IEEE ELECTRON DEVICE LETTERS, 2009, 30 (07) :718-720

[9] Monolithically Integrated Double-Ended Tuning Fork- Based Oscillator with Low Bias Voltage in Air Conditions [J].

Lopez, J. L. ;

Verd, J. ;

Marigo, E. ;

Uranga, A. ;

Murillo, G. ;

Giner, J. ;

Torres, F. ;

Abadal, G. ;

Barniol, N. .

PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 2009, 1 (01) :614-+

[10] Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies [J].

Lopez, J. L. ;

Verd, J. ;

Teva, J. ;

Murillo, G. ;

Giner, J. ;

Torres, F. ;

Uranga, A. ;

Abadal, G. ;

Barniol, N. .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 19 (01)

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