Diode-pumped TEM00 mode-solid state lasers and their micromachining applications

被引：42

作者：

Hodgson, N ^{[1
]}

Li, MW ^{[1
]}

Held, A ^{[1
]}

Krueger, A ^{[1
]}

机构：

[1] Spectra Phys Inc, Solid State Laser Business Unit, Mountain View, CA 94043 USA

来源：

PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS II | 2003年 / 4977卷

关键词：

diode-pumped solid state lasers; micromachining; ultrafast lasers; Q-switching; modelocking;

D O I：

10.1117/12.479574

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

During the last decade, diode-pumped TEM00 mode solid state lasers have gained widespread application in micromachining of dielectrics and metals. Commercial systems with output powers of up to 40W at 1064nm, 20W at 532nm, 15W at 355nm and 2W at 266nm, repetition rates of up to 400kHz and pulse durations between 10ns and 100ns are now being used in numerous micromachning applications. In addition, industrial applications of modelocked lasers are starting to emerge. This paper will give an overview of the state-of the art of diode-pumped TEM00 mode solid state lasers and their applications in micromachining.

引用

页码：281 / 294

页数：14

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