Revealing hidden pore structure in nanoporous thin films using positronium annihilation lifetime spectroscopy

被引：13
作者：
Peng, HG [1 ]
Frieze, WE
Vallery, RS
Gidley, DW
Moore, DL
Carter, RJ
机构：
[1] Univ Michigan, Dept Phys, Ann Arbor, MI 48109 USA
[2] LSI Log Corp, Gresham, OR 97030 USA
来源：
APPLIED PHYSICS LETTERS | 2005年 / 86卷 / 12期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1063/1.1886905
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The highly inhomogeneous pore morphology of a plasma-enhanced-chemical-vapor-deposited ultralow-k dielectric film (k=2.2) has been revealed using depth-profiled positronium annihilation lifetime spectroscopy (PALS) combined with progressive etch back of the film surface. The film is found to have a dense surface layer, an intermediate layer of 1.8 nm diameter mesopores, and a deep region of similar to 3 nm diameter mesopores. After successively etching of the sealing layer and the isolated 1.8 nm pore region, PALS reveals that the underlying large pores are highly interconnected. This inhomogeneous pore structure is proposed to account for observed difficulties in film integration. (C) 2005 American Institute of Physics.
引用
收藏
页码：1 / 3
页数：3
相关论文
共 50 条
  • [21] Pore structure analysis of ionic liquid-templated porous silica using positron annihilation lifetime spectroscopy
    Sagara, Akihiko
    Yabe, Hiroki
    Chen, X.
    Vereecken, Philippe M.
    Uedono, Akira
    MICROPOROUS AND MESOPOROUS MATERIALS, 2020, 295
  • [22] Porosity of ordered silica materials by nitrogen adsorption and positronium annihilation lifetime spectroscopy
    Goworek, J
    Wawryszczuk, J
    Zaleski, R
    JOURNAL OF COLLOID AND INTERFACE SCIENCE, 2001, 243 (02) : 427 - 432
  • [23] Pore morphologies in disordered nanoporous thin films
    Hedstrom, JA
    Toney, MF
    Huang, E
    Kim, HC
    Volksen, W
    Magbitang, T
    Miller, RD
    LANGMUIR, 2004, 20 (05) : 1535 - 1538
  • [24] Composition of pore surface investigated by positron annihilation lifetime spectroscopy
    Gorgol, Marek
    Tydda, Maciej
    Kierys, Agnieszka
    Zaleski, Radoslaw
    MICROPOROUS AND MESOPOROUS MATERIALS, 2012, 163 : 276 - 281
  • [25] Structural evolution of nanoporous silica thin films studied by positron annihilation spectroscopy and Fourier transform infrared spectroscopy
    Patel, N.
    Mariazzi, S.
    Toniutti, L.
    Checchetto, R.
    Miotello, A.
    Dire, S.
    Brusa, R. S.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (17) : 5266 - 5274
  • [26] Pore structure of the polyethyleneimine/SBA-15 nanocomposites studied by positron annihilation lifetime spectroscopy
    Song, Tong
    Zhang, Peng
    Zhang, Chao
    Gong, Liliang
    Cao, Xingzhong
    Wang, Baoyi
    Yu, Runsheng
    Zhou, Wei
    MICROPOROUS AND MESOPOROUS MATERIALS, 2022, 334
  • [27] Pore Size Determination of TEMPO-Oxidized Cellulose Nanofibril Films by Positron Annihilation Lifetime Spectroscopy
    Fukuzumi, Hayaka
    Saito, Tsuguyuki
    Iwamoto, Shinichiro
    Kumamoto, Yoshiaki
    Ohdaira, Toshiyuki
    Suzuki, Ryoichi
    Isogai, Akira
    BIOMACROMOLECULES, 2011, 12 (11) : 4057 - 4062
  • [28] Molecular pore size characterization within chitosan biopolymer using positron annihilation lifetime spectroscopy
    Chaudhary, D.
    Went, M. R.
    Nakagawa, K.
    Buckman, S. J.
    Sullivan, J. P.
    MATERIALS LETTERS, 2010, 64 (23) : 2635 - 2637
  • [29] Novel method for stratum corneum pore size determination using positron annihilation lifetime spectroscopy
    Itoh, Yoshiaki
    Shimazu, Akira
    Sadzuka, Yasuyuki
    Sonobe, Takashi
    Itai, Shigeru
    INTERNATIONAL JOURNAL OF PHARMACEUTICS, 2008, 358 (1-2) : 91 - 95
  • [30] Nano-pore size and porosity study by means of Nuclear Magnetic Resonance and Positronium Annihilation Lifetime
    Chesta, M. A.
    Ramia, M. E.
    Jeandrevin, S.
    Martin, C. A.
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2009, 97 (02): : 301 - 307
12345