Automated surface positioning for a non-null test interferometer

被引:17
作者
Baer, Goran [1 ]
Garbusi, Eugenio [1 ]
Lyda, Wolfram [1 ]
Osten, Wolfgang [1 ]
机构
[1] Univ Stuttgart, Inst Tech Opt, D-70569 Stuttgart, Germany
关键词
Interferometry; aspheres; non-null testing; COMPUTER-GENERATED HOLOGRAMS; OFF-AXIS; ERRORS; OPTICS;
D O I
10.1117/1.3488051
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
An automatic method for the positioning of the test surface in a non-null interferometer is presented. A major task in the interferometric testing of surfaces is to avoid the introduction of surface aberrations due to an incorrect placement of the test object in the interferometer cavity. In the case of plane and spherical surfaces, adjustment errors can usually be distinguished from surface figure errors and therefore removed, but in the case of aspherical surfaces this task becomes nontrivial. In this work, the effect on the measured phase due to lateral and axial displacements of the aspherical surface is calculated, and an adjustment method for the positioning of the surface at a predefined measurement location presented. Experimental results showing the feasibility of the proposed procedure are shown. (C) 2010 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.3488051]
引用
收藏
页数:12
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