Monte Carlo calculations in X-ray microanalysis of epitaxial layers

The calculation of the X-ray depth distribution function is an important tool in developing quantitative microanalysis correction procedures, especially for structures with thin layers. We used a Monte Carlo method to calculate depth distribution functions. The depth distributions for a wide range of binary A(III)B(V) and A(II)B(VI) compounds and their solid solutions have been calculated. Several procedures for thin layers microanalysis based on X-ray depth distribution functions are suggested. Examples of quantitative microanalysis of semiconductor heterostructures with thin layers (d = 0.05-0.5 mu m) are presented.