[1] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[3] Beijing Key Lab Three Dimens & Nanometer Integrat, Beijing 100029, Peoples R China
[4] Chinese Acad Sci, Inst Elect Engn, Beijing 100190, Peoples R China
[5] Univ Paris Saclay, Sorbonne Univ, CNRS, Grp Elect & Elect Engn Paris,CentraleSupelec, F-75005 Paris, France