共 29 条
[1]
Alduino A., 2010, INTEGRATED PHOTONICS
[3]
Atabaki AH, 2011, CONF LASER ELECTR
[9]
Optimization of hydrogen silsesquioxane for photonic applications
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2007, 25 (06)
:2658-2661