Enhanced Wall Plug Efficiency of AlGaN-Based Deep-UV LEDs Using Mo/Al as p-Contact

被引:20
作者
Cho, Hyun Kyong [1 ]
Susilo, Norman [2 ]
Guttmann, Martin [2 ]
Rass, Jens [1 ]
Ostermay, Ina [1 ]
Hagedorn, Sylvia [1 ]
Ziffer, Eviathar [2 ]
Wernicke, Tim [2 ]
Einfeldt, Sven [1 ]
Weyers, Markus [1 ]
Kneissl, Michael [1 ,2 ]
机构
[1] Leibniz Inst Hochstfrequenztech, Ferdinand Braun Inst, D-12489 Berlin, Germany
[2] Tech Univ Berlin, Inst Solid State Phys, D-10623 Berlin, Germany
关键词
Light emitting diodes; Reflectivity; Indium tin oxide; Annealing; Semiconductor device measurement; Aluminum gallium nitride; Deep UV; light emitting diodes (LEDs); p-AlGaN; reflective p-side contact; efficiency; LIGHT-EMITTING DIODE; OHMIC CONTACTS; TI/AL/MO/AU;
D O I
10.1109/LPT.2020.3003164
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
P-type contacts with a high reflectivity in the ultraviolet spectral region made of molybdenum/aluminum (Mo/Al) on AlGaN-based deep-ultraviolet light-emitting diodes (DUV LEDs) emitting at 265 nm have been investigated. Optimized Mo/Al contacts are shown to have a high optical reflectivity above 75% at 265 nm. DUV LEDs with an absorbing p-AlGaN heterostructure operated at 20 mA show a 15% higher light output power and a 1 V lower voltage when Mo/Al instead of Pt is used as p-contact. The effect on the voltage of DUV LEDs with a UV-transparent p-side heterostructure is similar. Moreover, DUV LEDs with a Mo/Al contact show a lower operation voltage compared to LEDs with an indium tin oxide/aluminum (ITO/Al) p-contact where the ITO is intended to form a semitransparent low-resistance contact and the Al serves as a reflector.
引用
收藏
页码:891 / 894
页数:4
相关论文
共 15 条
[1]   Highly Reflective p-Contacts Made of Pd-Al on Deep Ultraviolet Light-Emitting Diodes [J].
Cho, Hyun Kyong ;
Ostermay, Ina ;
Zeimer, Ute ;
Enslin, Johannes ;
Wernicke, Tim ;
Einfeldt, Sven ;
Weyers, Markus ;
Kneissl, Michael .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2017, 29 (24) :2222-2225
[2]   Ultraviolet GaN Light-Emitting Diodes with Porous-AlGaN Reflectors [J].
Fan, Feng-Hsu ;
Syu, Zun-Yao ;
Wu, Chia-Jung ;
Yang, Zhong-Jie ;
Huang, Bo-Song ;
Wang, Guan-Jhong ;
Lin, Yung-Sen ;
Chen, Hsiang ;
Kao, Chyuan Hauer ;
Lin, Chia-Feng .
SCIENTIFIC REPORTS, 2017, 7
[3]   Quaternary InAlGaN-based high-efficiency ultraviolet light-emitting diodes [J].
Hirayama, H .
JOURNAL OF APPLIED PHYSICS, 2005, 97 (09)
[4]   The reflectivity of Mo/Ag/Au ohmic contacts on p-type GaN for flip-chip light-emitting diode (FCLED) applications [J].
Jeng, Ming-Jer ;
Shiue, Ching-Chuan ;
Chang, Liann-Be .
APPLIED SURFACE SCIENCE, 2008, 254 (15) :4479-4482
[5]   Enhanced light extraction in 260 nm light-emitting diode with a highly transparent p-AlGaN layer [J].
Jo, Masafumi ;
Maeda, Noritoshi ;
Hirayama, Hideki .
APPLIED PHYSICS EXPRESS, 2016, 9 (01)
[6]  
Kneissl M., 2016, SERIES MAT SCI, V227
[7]   Thermally-stable low-resistance Ti/Al/Mo/Au multilayer ohmic contacts on n-GaN [J].
Kumar, V ;
Zhou, L ;
Selvanathan, D ;
Adesida, I .
JOURNAL OF APPLIED PHYSICS, 2002, 92 (03) :1712-1714
[8]   Enhancing the light-extraction efficiency of AlGaN deep-ultraviolet light-emitting diodes using highly reflective Ni/Mg and Rh as p-type electrodes [J].
Maeda, Noritoshi ;
Yun, Joosun ;
Jo, Masafumi ;
Hirayama, Hideki .
JAPANESE JOURNAL OF APPLIED PHYSICS, 2018, 57 (04)
[9]   Indium tin oxide contacts to gallium nitride optoelectronic devices [J].
Margalith, T ;
Buchinsky, O ;
Cohen, DA ;
Abare, AC ;
Hansen, M ;
DenBaars, SP ;
Coldren, LA .
APPLIED PHYSICS LETTERS, 1999, 74 (26) :3930-3932
[10]   A Review of AlGaN-Based Deep-Ultraviolet Light-Emitting Diodes on Sapphire [J].
Nagasawa, Yosuke ;
Hirano, Akira .
APPLIED SCIENCES-BASEL, 2018, 8 (08)