The structure and mechanism of porous silica films by sol-gel method using poly(ethylene glycol) and side-chain polyether modified polydimethylsiloxane with terminal Si-CH3 as templates

被引：5

作者：

Dong, Dong ^{[1
]}

Liu, Xiaobo ^{[1
]}

Hu, Wencheng ^{[1
]}

机构：

[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China

来源：

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS | 2011年 / 22卷 / 08期

关键词：

MESOPOROUS SILICA; CARBON-DIOXIDE; SEPARATION; POROSITY;

D O I：

10.1007/s10854-010-0241-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper has successfully prepared thick and crack-free silica films with nano-porous structure at a high annealing temperature of 650 A degrees C via sol-gel processing by introducing poly(ethylene glycol) (PEG) and side-chain polyether modified polydimethylsiloxane with terminal Si-CH3 (p-PDMS) as templates to the acid-catalyzed silica system. The differential thermal analysis (DTA), thermogravimetric analysis (TGA), FTIR spectra, ellipsometry, and field emitted scanning electron microscope (FESEM) were used to characterize the samples. The present work focused on the effect of the two polymer templates on the microstructures of samples, and a model concerning the pore formation was suggested.

引用

页码：944 / 948

页数：5

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