Experimental characterization of capacitive micromachined ultrasonic transducers

被引：1

作者：

Olcum, Selim ^{[1
]}

Atalar, Abdullah ^{[1
]}

Koymen, Hayerttin ^{[1
]}

Oguz, Kagan ^{[1
]}

Senlik, Muhammed N. ^{[1
]}

机构：

[1] Bilkent Univ, Dept Elect & Elect Engn, Ankara, Turkey

来源：

2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6 | 2007年

关键词：

cMUT; capacitive micromachined ultrasonic transducers;

D O I：

10.1109/ULTSYM.2007.536

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.

引用

页码：2131 / 2134

页数：4

共 3 条

[1]

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[3] Low temperature fabrication of immersion capacitive micromachined ultrasonic transducers on silicon and dielectric substrates [J].

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IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2004, 51 (10) :1324-1333

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