SPURIOUS SIGNALS IN THE THERMAL MEMS GYROSCOPE

被引：0

作者：

Shooshtari, Pooneh ^{[1
]}

Bahari, Jamal ^{[1
]}

Khosraviani, Kourosh ^{[1
]}

Leung, Albert ^{[1
]}

Jones, John ^{[1
]}

机构：

[1] Simon Fraser Univ, Sch Engn Sci, Burnaby, BC V5A 1S6, Canada

来源：

INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION - 2012, VOL 9, PTS A AND B | 2013年

关键词：

gyroscope; MEMS; accelerometer;

D O I：

暂无

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

The operational principle of a thermal MEMS (Micro Electro-Mechanical Systems) gyroscope was reported in Hilton Head 2010 [1]. In the current work we describe two factors that can produce a spurious rotation signal in gyroscopes of this type. These factors are, firstly, distortion or asymmetric placement of the heating elements or temperature sensors; secondly, the effects of linear acceleration and/or gravity on the fluid flow inside the device, and hence on the gyroscope output. In order to simulate the thermal gyro and the origin of these spurious signals, a mathematical model is built and developed through the COMSOL CFD package. The spurious signals predicted by this simulation are shown to correspond to experimental measurements. Alternative cavity shapes are investigated and simulated as a mean of suppressing the spurious signal.

引用

页码：587 / 596

页数：10