Surface erosion by moving ion beam

被引：0
作者：
Rudy, A. S. [1 ]
Kulikov, A. N. [2 ]
Bachurin, V. I. [1 ]
机构：
[1] Russian Acad Sci, Valiev Inst Phys & Technol, Yaroslavl Branch, St 21, Yaroslavl 150007, Russia
[2] Yaroslavl State Univ, Sovetskaya St 14, Yaroslavl 150000, Russia
来源：
VACUUM | 2021年 / 193卷
关键词：
Sputtering; Moving ion beam; Boundary value problem; State of equilibrium; Discontinuous solution; PATTERN-FORMATION; RIPPLE FORMATION; SILICON;
D O I：
10.1016/j.vacuum.2021.110504
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A mathematical model of surface erosion in a course of a trench formation by translationally moving ion beam of a Gaussian shape is considered. The solutions obtained in self-similar variables describe the states of equilibrium of the boundary value problem and their dependence on the sputtering parameters. It is shown that there are three parameter areas in which only smooth, smooth and discontinuous and only discontinuous solutions exist. The plots of the surface profiles corresponding to three possible types of solutions are given. Formulas for calculating the profile of etching trenches and examples of calculating profiles corresponding to smooth and discontinuous solutions are given.
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页数：9
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共 23 条
  • [1] Angular dependences of surface composition, sputtering and ripple formation on silicon under N2+ ion bombardment
    Bachurin, VI
    Lepshin, PA
    Smirnov, VK
    [J]. VACUUM, 2000, 56 (04) : 241 - 245
  • [2] Behrisch, 1983, SPUTTERING PARTICLE
  • [3] THEORY OF RIPPLE TOPOGRAPHY INDUCED BY ION-BOMBARDMENT
    BRADLEY, RM
    HARPER, JME
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04): : 2390 - 2395
  • [4] Roughening and ripple instabilities on ion-bombarded Si
    Carter, G
    Vishnyakov, V
    [J]. PHYSICAL REVIEW B, 1996, 54 (24): : 17647 - 17653
  • [5] The physics and applications of ion beam erosion
    Carter, G
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2001, 34 (03) : R1 - R22
  • [6] Hydrodynamic approach to surface pattern formation by ion beams
    Castro, Mario
    Cuerno, Rodolfo
    [J]. APPLIED SURFACE SCIENCE, 2012, 258 (09) : 4171 - 4178
  • [7] Prediction of ion-induced nanopattern formation using Monte Carlo simulations and comparison to experiments
    Hofsaess, Hans
    Bobes, Omar
    [J]. APPLIED PHYSICS REVIEWS, 2019, 6 (02)
  • [8] Surface instability and pattern formation by ion-induced erosion and mass redistribution
    Hofsaess, Hans
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2014, 114 (02): : 401 - 422
  • [9] THE PARTIAL DIFFERENTIAL EQUATION UT+UUX=MU-XX
    HOPF, E
    [J]. COMMUNICATIONS ON PURE AND APPLIED MATHEMATICS, 1950, 3 (03) : 201 - 230
  • [10] DYNAMIC SCALING OF GROWING INTERFACES
    KARDAR, M
    PARISI, G
    ZHANG, YC
    [J]. PHYSICAL REVIEW LETTERS, 1986, 56 (09) : 889 - 892
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