Spectroscopic ellipsometry: Application to complex optoelectronic layer systems

被引：0
|
作者：
Rheinlander, B [1 ]
Schubert, M [1 ]
Schmidt, H [1 ]
机构：
[1] Univ Leipzig, Fac Phys & Geosci, Dept Semicond, D-04103 Leipzig, Germany
来源：
HETEROSTRUCTURE EPITAXY AND DEVICES: HEAD '97 | 1998年 / 48卷
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D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：151 / 154
页数：4
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