Topography retrieval using different solutions of the transport intensity equation

被引:23
作者
Pinhasi, Shirly V. [1 ,2 ]
Alimi, Roger [1 ]
Perelmutter, Lior [1 ]
Eliezer, Shalom [1 ]
机构
[1] Soreq Nucl Res Ctr, Div Appl Phys, IL-81800 Yavne, Israel
[2] Hebrew Univ Jerusalem, Dept Phys, Jerusalem, Israel
关键词
PHASE RETRIEVAL; MICROSCOPY; OPTICS;
D O I
10.1364/JOSAA.27.002285
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The topography of a phase plate is recovered from the phase reconstruction by solving the transport intensity equation (TIE). The TIE is solved using two different approaches: (a) the classical solution of solving the Poisson differential equation and (b) an algebraic approach with Zernike functions. In this paper we present and compare the topography reconstruction of a phase plate with these solution methods and justify why one solution is preferable over the other. (C) 2010 Optical Society of America
引用
收藏
页码:2285 / 2292
页数:8
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