Determination of refractive index profiles of gradient optical waveguides by ellipsometry

Ag+-Na+ and K+-Na+ ion-exchanged optical waveguides in soda-lime glass are characterised by ellipsometry. Refractive index profiles of the waveguides are calculated from ellipsometric multiple angle of incidence data using the Newton-Kantorovitch type iterative procedure and compared with those reconstructed by inverse WKB method. It is demonstrated that such continuous profiles with relatively small index gradient (of the order of 0.1 and 0.01), extending to few micrometers in depth, can be determined by ellipsometric measurements. A good agreement is found between results obtained by ellipsometry and by the inverse WKB method at depths above 500-600 nm, while there is a difference in the subsurface region, where ellipsometry is more sensitive to the quality of the surface. The profiles obtained by the two methods are consistent if the surface thin layer is etched. (C) 1998 Elsevier Science B.V. All rights reserved.