Electroless CoNiFeB soft magnetic thin films with high corrosion resistance

被引:40
作者
Yokoshima, T
Kaneko, D
Akahori, M
Nam, HS
Osaka, T
机构
[1] Waseda Univ, Sch Sci & Engn, Dept Appl Chem, Shinjuku Ku, Tokyo 1698555, Japan
[2] Waseda Univ, Kagami Mem Lab Mat Sci & Technol, Shinjuku Ku, Tokyo 1698555, Japan
基金
日本学术振兴会;
关键词
soft magnetic thin film; electroless deposition; corrosion resistance;
D O I
10.1016/S0022-0728(00)00172-8
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A new soft magnetic CoNiFeB thin film with high saturation magnetic flux density, B-S and good corrosion resistance has been prepared by using an electroless deposition method. The electroless CoFeB thin film has high B-S but a poor corrosion resistance compared with the electrodeposited NiFe (80-permalloy) film. The addition of Ni to the CoFeB film improves corrosion resistance without affecting its soft magnetic properties. One of the best CoNiFeB films prepared had a composition of Co77Ni13Fe9B1 with excellent magnetic and electrical properties (high B-S = 1.5-1.7 T, low coercivity, H-C = 1.2 Oe, low magnetostriction, lambda (S) = 2.0 x 10(-6), and moderate resistivity, rho = 40 mu Ohm cm). The new CoNiFeB thin film is suitable for use as a core material for the next generation of merged MR-heads. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:197 / 202
页数:6
相关论文
共 32 条
[1]  
ANDERSON NC, 1987, Patent No. 4661216
[2]  
[Anonymous], J MAGN SOC JAPAN
[3]  
Chang J. W., 1992, Proceedings of the Second International Symposium on Magnetic Materials, Processes, and Devices, P275
[4]  
HOSHI Y, 1986, JPN J APPL MAGN SOC, V10, P315
[5]   SOFT MAGNETISM OF HIGH-NITROGEN-CONCENTRATION FETAN FILMS [J].
ISHIWATA, N ;
WAKABAYASHI, C ;
URAI, H .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (08) :5616-5618
[6]  
Kim D, 1996, PLAT SURF FINISH, V83, P78
[7]   SOFT-MAGNETIC FILMS BY ELECTROLESS NI-CO-P PLATING [J].
KIM, DH ;
AOKI, K ;
TAKANO, O .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (11) :3763-3767
[8]  
KIM DH, 1994, J SURF FINISH SOC JP, V45, P203
[9]  
KOJIMA H, 1984, REPORT RES I SCI MEA, V33, P1
[10]   HIGH MOMENT COFE THIN-FILMS BY ELECTRODEPOSITION [J].
LIAO, SH .
IEEE TRANSACTIONS ON MAGNETICS, 1987, 23 (05) :2981-2983