Magnetron co-sputtering synthesis and nanoindentation studies of nanocrystalline (TiZrHf)x(NbTa)1-x high-entropy alloy thin films

被引:19
作者
Cheng, Changjun [1 ]
Zhang, Xiaofu [2 ,3 ]
Hache, Michel J. R. [1 ]
Zou, Yu [1 ]
机构
[1] Univ Toronto, Dept Mat Sci & Engn, Toronto, ON M5S 3E4, Canada
[2] Chinese Acad Sci, State Key Lab Funct Mat Informat Shanghai, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China
[3] Chinese Acad Sci, Ctr Excellence Superconducting Elect, Shanghai 200050, Peoples R China
基金
加拿大创新基金会; 加拿大自然科学与工程研究理事会;
关键词
high-entropy alloys; nanocrystalline alloys; refractory metals; thin films; magnetron co-sputtering; nanoindentation; MECHANICAL-PROPERTIES; LATTICE-PARAMETER; PHASE-TRANSITION; ELASTIC-MODULUS; INDENTATION; HARDNESS; MICROSTRUCTURE; DEPENDENCE; SUBSTRATE; HAFNIUM;
D O I
10.1007/s12274-021-3805-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Refractory high-entropy alloys (HEAs) possess many useful properties such as high strength and high-temperature stability. So far, most studies on refractory HEAs have been limited to a few well-known compositions and on their coarse-grain bulk forms. Here we fabricate nanocrystalline (TiZrHf)(x)(NbTa)(1-x) HEA thin films with a large range of compositions (x = 0.07-0.90) by the direct current (DC) magnetron co-sputtering technique and measure their mechanical properties using the nanoindentation method. All the as-deposited HEA thin films show a solid-solution body-centered cubic (bcc) structure. As the compositional ratio (x) increases, the elastic modulus decreases from 153 to 123 GPa, following the trend of the rule of mixture. As x increases, the hardness first decreases from 6.5 GPa (x = 0.07) to the lowest value (4.6 GPa, x = 0.48) and then increases to the highest value (7.1 GPa, x = 0.90), showing a concave trend. The change in hardness might be attributed to the combinational influence caused by the atomic size and modulus effects, as well as the texture effect. The authors also propose a few open questions for future studies on this and related HEA systems.
引用
收藏
页码:4873 / 4879
页数:7
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