Experimental characterization of a density peak at low magnetic fields in a helicon plasma source

被引:26
作者
Sato, G. [1 ]
Oohara, W. [1 ]
Hatakeyama, R. [1 ]
机构
[1] Tohoku Univ, Dept Elect Engn, Sendai, Miyagi 9808579, Japan
关键词
D O I
10.1088/0963-0252/16/4/007
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
We investigated characteristics of a density peak observed in a magnetic field B-0 lower than 100 G in the case of using helicon plasma sources with particular wavelength. For B-0 > 30 G, the antenna launches an electromagnetic wave as a slow wave, the phase velocity of which becomes close to the electron thermal velocity under the density-peak condition for various gas pressures. The Landau damping frequency is higher than the electron-neutral and the electron-ion collision frequencies, which indicates that the wave produces the plasma via Landau damping at low B-0. The wavelengths estimated from the density ne and B-0 for the density peaks agree with those of the electromagnetic field generated by helicon antennas of various lengths. The measured density is found to vary under the condition of the agreement between wavelengths of the propagating wave and the antenna-excited field during the density increase. One of the causes of the density peak appearing as a function of B-0 is considered to be the wavelength variation and the corresponding change of phase velocity of the slow wave which is enabled to propagate in the plasma by the introduction of B-0.
引用
收藏
页码:734 / 741
页数:8
相关论文
共 31 条
  • [1] Evidence for Trivelpiece-Gould modes in a Helicon discharge
    Blackwell, DD
    Madziwa, TG
    Arnush, D
    Chen, FF
    [J]. PHYSICAL REVIEW LETTERS, 2002, 88 (14) : 4 - 145002
  • [2] Helicons - The early years
    Boswell, RW
    Chen, FF
    [J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 1997, 25 (06) : 1229 - 1244
  • [3] BOSWELL RW, 1984, PLASMA PHYS CONTR F, V26, P1147, DOI 10.1088/0741-3335/26/10/001
  • [4] Downstream plasma characteristics from a single loop antenna in a helicon processing reactor
    Carter, C
    Khachan, J
    [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 1999, 8 (03) : 432 - 439
  • [5] Characterization and modeling of a Helicon plasma source
    Cheetham, AD
    Rayner, JP
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (05): : 2777 - 2784
  • [6] EXPERIMENTS ON HELICON PLASMA SOURCES
    CHEN, FF
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04): : 1389 - 1401
  • [7] Helicons - The past decade
    Chen, FF
    Boswell, RW
    [J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 1997, 25 (06) : 1245 - 1257
  • [8] The low-field density peak in helicon discharges
    Chen, FF
    [J]. PHYSICS OF PLASMAS, 2003, 10 (06) : 2586 - 2592
  • [9] PLASMA IONIZATION BY HELICON WAVES
    CHEN, FF
    [J]. PLASMA PHYSICS AND CONTROLLED FUSION, 1991, 33 (04) : 339 - 364
  • [10] Collisional, magnetic, and nonlinear skin effect in radio-frequency plasmas
    Chen, FF
    [J]. PHYSICS OF PLASMAS, 2001, 8 (06) : 3008 - 3017