Resolution limit of the white-light interferometric sensor for absolute position measurement based on central fringe maximum identification

被引：1

作者：

Manojlovic, L. M. ^{[1
,2
]}

Zivanov, M. B. ^{[2
]}

Slankamenac, M. P. ^{[2
]}

Stupar, D. Z. ^{[2
]}

Bajic, J. S. ^{[2
]}

机构：

[1] Zrenjanin Tech Coll, Zrenjanin 23000, Serbia

[2] Univ Novi Sad, Fac Tech Sci, Novi Sad 21000, Serbia

来源：

PHYSICA SCRIPTA | 2014年 / T162卷

关键词：

absolute position measurement; fiber-optic sensor; resolution limit; white-light interferometry; DISPLACEMENT; SPECTRUM;

D O I：

10.1088/0031-8949/2014/T162/014052

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

In this paper a simple theoretical analysis together with an experimental verification of the analysis that provides an estimation of the resolution limit of the white-light interferometric sensor for absolute position measurement based on central fringe maximum identification is presented. The resolution better than 10 pm is obtained in the white-light interferometric sensing system where the signal-to-noise ratio was greater than 80 dB.

引用

页数：4

共 10 条

[1] Fiber-optic-based absolute displacement sensors at 1500 nm by means of a variant of channeled spectrum signal recovery [J].

Boulet, C ;

Hathaway, M ;

Jackson, DA .

OPTICS LETTERS, 2004, 29 (14) :1602-1604

[2] A simple low-coherence interferometric sensor for absolute position measurement based on central fringe maximum identification [J].

Manojlovic, L. M. ;

Zivanov, M. B. ;

Slankamenac, M. P. ;

Stupar, D. Z. ;

Bajic, J. S. .

PHYSICA SCRIPTA, 2012, T149

[3] A simple white-light fiber-optic interferometric sensing system for absolute position measurement [J].

Manojlovic, Lazo M. .

OPTICS AND LASERS IN ENGINEERING, 2010, 48 (04) :486-490

[4] A THEORETICAL COMPARISON BETWEEN INTERFEROMETRIC AND OPTICAL BEAM DEFLECTION TECHNIQUE FOR THE MEASUREMENT OF CANTILEVER DISPLACEMENT IN AFM [J].

PUTMAN, CAJ ;

DEGROOTH, BG ;

VANHULST, NF ;

GREVE, J .

ULTRAMICROSCOPY, 1992, 42 :1509-1513

[5] Analysis of white light interferograms using wavelet methods [J].

Recknagel, RJ ;

Notni, G .

OPTICS COMMUNICATIONS, 1998, 148 (1-3) :122-128

[6]

Robins W P, 1984, IEE TELECOMMUNICATIO

[7] USE OF CHANNELED SPECTRA TO MEASURE ABSOLUTE PHASE SHIFT AND DISPERSION IN 2 BEAM INTERFEROMETRY [J].

SANDEMAN, RJ .

APPLIED OPTICS, 1971, 10 (05) :1087-&

[8]

Schnell U., 1995, Pure and Applied Optics, V4, P643, DOI 10.1088/0963-9659/4/5/016

[9] ABSOLUTE DISPLACEMENT MEASUREMENTS USING MODULATION OF THE SPECTRUM OF WHITE-LIGHT IN A MICHELSON INTERFEROMETER [J].

SMITH, LM ;

DOBSON, CC .

APPLIED OPTICS, 1989, 28 (16) :3339-3342

[10] DISPLACEMENT SENSOR USING CHANNELED SPECTRUM DISPERSED ON A LINEAR CCD ARRAY [J].

TAPLIN, S ;

PODOLEANU, AG ;

WEBB, DJ ;

JACKSON, DA .

ELECTRONICS LETTERS, 1993, 29 (10) :896-897

← 1 →