Piezoelectric Membrane Based Biosensor Platform

被引：6

作者：

Lu, Xu ^{[1
]}

Li, Shaokang ^{[1
]}

Xu, Zhuo ^{[1
]}

Ren, Wei ^{[1
]}

Cheng, Zhongyang ^{[2
]}

机构：

[1] Xi An Jiao Tong Univ, Key Lab, Elect Mat Res Lab, Minist Educ, Xian 710049, Peoples R China

[2] Auburn Univ, Mat Res & Educ Ctr, Auburn, AL 36849 USA

来源：

FERROELECTRICS | 2010年 / 409卷

关键词：

Biosensor; Membrane; Q factor; liquid environments; MEMS; CANTILEVER-BASED BIOSENSORS; SENSORS; IMMUNOSENSORS;

D O I：

10.1080/00150193.2010.485950

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The piezoelectric membrane, working as flexural acoustic wave devices, is introduced as high performance biosensor platform. Membranes made of polyvinylidene fluoride (PVDF) thin film were fabricated and the influences of size and stress on the resonance behaviors have been investigated. It is experimentally found that membrane could exhibits a nearly same Q factor both in air and in water. Additionally, the microelectronic process combined with megnetron sputtering deposition for fabricating ZnO micro membrane biosensor platform on silicon wafer is established in this paper.

引用

页码：78 / 84

页数：7

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