Profile error compensation approaches for parallel nanogrinding of aspherical mould inserts

被引:73
作者
Huang, H. [1 ]
Chen, W. K.
Kuriyagawa, T.
机构
[1] Univ Queensland, Sch Engn, Brisbane, Qld 4072, Australia
[2] Makino Asia Pte Ltd, Singapore 629649, Singapore
[3] Tohoku Univ, Dept Nanomech, Sendai, Miyagi 9808579, Japan
基金
澳大利亚研究理事会;
关键词
compensation; mould insert; grinding; aspherical surface; protile error;
D O I
10.1016/j.ijmachtools.2007.06.008
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper reports a parallel nanogrinding protocol for fabricating aspherical mould inserts. In the protocol, a preliminary grinding cycle was first employed, which significantly reduced the effect of the initial wheel geometry error on the ground profile accuracy. A new compensation approach was developed. The compensation used the ground profile measured from a Talysurf profilometer to modify the NC toot path for the next grinding cycle. The tool path was modified by offsetting the residual profile error along the normal direction of a grinding point, rather than in the horizontal direction commonly used in the conventional method. The performance of the developed method was evaluated by fabricating aspherical mould inserts on cemented tungsten carbide. The result indicated that the residual profile error after two grinding cycles was reduced to approximately 0.4 mu m in PV, with average surface roughness of below 10 nm, which is more efficient than the conventional compensation process. (C) 2007 Elsevier Ltd. All rights reserved.
引用
收藏
页码:2237 / 2245
页数:9
相关论文
共 16 条
[1]   Machining of micro aspherical mould inserts [J].
Chen, WK ;
Kuriyagawa, T ;
Huang, H ;
Yosihara, N .
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2005, 29 (03) :315-323
[2]   Design of a six-axis high precision machine tool and its application in machining aspherical optical mirrors [J].
Cheng, HB ;
Feng, ZJ ;
Cheng, K ;
Wang, YW .
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2005, 45 (09) :1085-1094
[3]   Development of single step grinding system for large scale φ 300 Si wafer:: A total integrated fixed-abrasive solution [J].
Eda, H ;
Zhou, L ;
Nakano, H ;
Kondo, R ;
Shimizu, J .
CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2001, 50 (01) :225-228
[4]  
ENOMOTO T, 1996, ANN CIRP, V45, P351
[5]   Test procedures for severely aspheric optics [J].
Freeman, MH ;
Gray, C .
SPECIFICATION, PRODUCTION, AND TESTING OF OPTICAL COMPONENTS AND SYSTEMS, 1996, 2775 :538-548
[6]   A fast Gauss filtering algorithm for roughness measurements [J].
Krystek, M .
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1996, 19 (2-3) :198-200
[7]   A new grinding method for aspheric ceramic mirrors [J].
Kuriyagawa, T ;
Zahmaty, MSS ;
Syoji, K .
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 1996, 62 (04) :387-392
[8]  
NEGISHI M, 1995, P SOC PHOTO-OPT INS, V2576, P336, DOI 10.1117/12.215612
[9]  
Negishi M., 1995, Journal of the Japan Society of Precision Engineering, V61, P1725, DOI 10.2493/jjspe.61.1725
[10]  
NISHIGUCHI T, 1991, ANN CIRP, V40, P367