Material Processing with 12 Femtosecond Picojoule Laser Pulses

被引:0
作者
Koenig, Karsten [1 ]
Licht, Martin [1 ]
Straub, Martin [1 ]
Uchugonova, Aisada [1 ]
机构
[1] Univ Saarland, Dept Biophoton & Laser Technol, D-66123 Saarbrucken, Germany
来源
ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS V | 2012年 / 8249卷
关键词
nanoprocessing; femtosecond laser; two-photon; lithography; silicon wafer; cell; SILICON;
D O I
10.1117/12.908284
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Extremely short near infrared laser pulses (e.g. 10 fs) offer the possibility of precise sub-100nm processing without collateral side effects. Furthermore, the can be employed to excite a variety of absorbers simultaneously due to their broad 100 nm emission band. We demonstrate two-photon fluorescence imaging of green and red fluorescent proteins in living cells as well as two-photon nanolithography with 12 fs laser pulses (750-850 nm) at low microwatt mean power using an 85 MHz laser resonator. At a minimum of 400 mu W mean power, direct nanoprocessing in blood cells was realized. Multiphoton ablation in biological specimens follows a P-2/tau relation. We were able to create sub-100nm ripples in silicon wafers, to cut glass, gold, and polymers as well as to create transient nanoholes in the membranes of living stem cells and cancer cells for targeted transfection.
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页数:7
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