A method for improving performance of IR focal plane array using microlens array

被引：10

作者：

Du, CL

Guo, LR

Wang, YR

Zhou, LS

Sun, GL

Zhang, J

Lin, XD

Li, Z

Zhou, ZB

机构：

来源：

MICRO-OPTICAL TECHNOLOGIES FOR MEASUREMENT, SENSORS, AND MICROSYSTEMS II AND OPTICAL FIBER SENSOR TECHNOLOGIES AND APPLICATIONS | 1997年 / 3099卷

关键词：

IR focal plane array; fill factor; diffractive microlens array; diffractive optical concentrator;

D O I：

10.1117/12.281214

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An experiment which a diffractive microlens array(DMA) on germanium is used for enhancing the fill factor of infrared focal plane array has been described in this paper. In order to achieve higher effective fill factor, the diffractive efficiency of each microlens and the transmissivity of the final element must be emphasized. The fabrication and the anti-reflection film evaporation for the diffractive microlens array have been studied. Based on a precise mechanics we have designed, a coupling experiment has been done and the main performance has been discussed. The fill factor of 80% is expected to be reached for the detector with original fill factor of 25%.

引用

页码：107 / 114

页数：8