Protective coatings for semiconductor temperature sensors

被引：0

作者：

Manko, VS

Khabibullin, IG

Andreev, VA

Shishkina, NS

机构：

来源：

JOURNAL OF OPTICAL TECHNOLOGY | 1996年 / 63卷 / 11期

关键词：

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Protective coatings with inclusions of thermoreaction particles for the sensitive element of temperature sensors have been fabricated and studied. It is shown that using such coatings makes it possible to enhance the stability and operating reliability of the sensors. (C) 1996 The Optical Society of America.

引用

页码：869 / 869

页数：1