On the correlation between morphology and gas sensing properties of RGTO SnO2 thin films

被引：14
作者：
Szuber, J [1 ]
Uljanow, J
Karczewska-Buczek, T
Jakubik, W
Waczynski, K
Kwoka, M
Konczak, S
机构：
[1] Silesian Tech Univ, Dept Microelect, Gliwice, Poland
[2] Silesian Tech Univ, Inst Elect, Gliwice, Poland
[3] Silesian Tech Univ, Inst Inorgan Chem, Gliwice, Poland
[4] Silesian Tech Univ, Inst Phys, PL-44100 Gliwice, Poland
来源：
THIN SOLID FILMS | 2005年 / 490卷 / 01期
关键词：
tin dioxide; thin films; deposition; oxidation; gas response;
D O I：
10.1016/j.tsf.2005.04.011
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper, we present the results of studies on optimalisation of morphology of the SnO2 thin films grown by RGTO technique for application as gas sensor structures. The Sri thin films were grown on Si(111) wafer and AI(2)O(3) ceramic plate heated in the range 235-295 degrees C and subsequently oxidized in dry oxygen atmosphere at high temperature, up to 700 degrees C. Our studies confirmed that the highest surface coverage of Sri droplets can be reached for the substrate temperature of about 265 degrees C leading to the highest surface-to-volume ratio of SnO2 thin films. It was in a good correlation to the optimal gas sensor response and sensor sensitivity of RGTO SnO2 thin films to nitrogen dioxide NO2. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码：54 / 58
页数：5
相关论文
共 18 条
[1]  
ASTE T, 1994, SENSOR ACTUAT B-CHEM, V24, P826
[2]   Fundamental and practical aspects in the design of nanoscaled SnO2 gas sensors:: a status report [J].
Barsan, N ;
Schweizer-Berberich, M ;
Göpel, W .
FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY, 1999, 365 (04) :287-304
[3]   CO and NO2 response of tin oxide silicon doped thin films [J].
Comini, E ;
Faglia, G ;
Sberveglieri, G .
SENSORS AND ACTUATORS B-CHEMICAL, 2001, 76 (1-3) :270-274
[4]   Influence of the completion of oxidation on the long-term response of RGTO SnO2 gas sensors [J].
Diéguez, A ;
Romano-Rodríguez, A ;
Morante, JR ;
Sangaletti, L ;
Depero, LE ;
Comini, E ;
Faglia, G ;
Sberveglieri, G .
SENSORS AND ACTUATORS B-CHEMICAL, 2000, 66 (1-3) :40-42
[5]  
Faglia G, 1996, SENSOR MATER, V8, P239
[6]   A model for the gas sensing properties of Al-doped SnO2 thin film after annealing [J].
Farag, ESM .
MATERIALS LETTERS, 2000, 43 (03) :139-143
[7]   SNO2 SENSORS - CURRENT STATUS AND FUTURE-PROSPECTS [J].
GOPEL, W ;
SCHIERBAUM, KD .
SENSORS AND ACTUATORS B-CHEMICAL, 1995, 26 (1-3) :1-12
[8]  
HELLMICH W, 1995, THIN SOLID FILMS, V263, P132
[9]  
IHOKURA K, 1994, STANNIC GAS SENSORS
[10]   Microstructure and gas-sensing properties of(Sn,Ti)O2 thin films deposited by RGTO technique [J].
Radecka, M ;
Przewoznik, J ;
Zakrzewska, K .
THIN SOLID FILMS, 2001, 391 (02) :247-254
12