Influence of substrate temperature on structure, microstructure and magnetic properties of sputtered Fe-Ga thin films

被引：41

作者：

Basumatary, Himalay ^{[1
,2
]}

Chelyane, J. Arout ^{[1
]}

Rao, D. V. Sridhara ^{[1
]}

Kamat, S. V. ^{[1
]}

Ranjan, R. ^{[2
]}

机构：

[1] Def Met Res Lab, Hyderabad 500258, Andhra Pradesh, India

[2] Indian Inst Sci, Dept Mat Engn, Bangalore 560012, Karnataka, India

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2015年 / 384卷

关键词：

Magnetostriction; Microstructure; Coercivity; DC magnetron spattering; MAGNETOELASTICITY; MAGNETOSTRICTION; THICKNESS;

D O I：

10.1016/j.jmmm.2015.02.021

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper reports the structure, microstructure and magnetic properties of Fe-Ga thin films deposited using DC magnetron sputtering technique on Si(100) substrate kept at different temperatures. Structural studies employing X-ray diffraction and TEM revealed the presence of only disordered A2 phase in the film. Columnar growth of nanocrystalline grains from the substrate was observed in the film deposited at room temperature. With increase in substrate temperature the grain size as well as surface roughness was found to increase. The magnetization of the films deposited at higher substrate temperatures were Found to saturate at lower magnetic held as compared to the room temperature deposited Film. Coercivity was found to decrease with increasing substrate temperature upto a minimum value of similar to 2 Oe for the film deposited at 450 degrees C and with further increase in substrate temperature it was found to increase. A maximum magnetostriction of 200 mu-strains was also observed for the film deposited at 450 degrees C. (C) 2015 Elsevier B.V. All rights reserved

引用

页码：58 / 63

页数：6

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