Wireless Remote Weather Monitoring System Based on MEMS Technologies

被引:29
作者
Ma, Rong-Hua [2 ]
Wang, Yu-Hsiang [3 ]
Lee, Chia-Yen [1 ]
机构
[1] Natl Pingtung Univ Sci & Technol, Dept Mat Engn, Pingtung 912, Taiwan
[2] Chinese Mil Acad, Dept Mech Engn, Kaohsiung 830, Taiwan
[3] Da Yeh Univ, Dept Mech & Automat Engn, Changhua 515, Taiwan
关键词
MEMS; WSN; weather monitoring system; HUMIDITY SENSORS; COMPENSATION;
D O I
10.3390/s110302715
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
This study proposes a wireless remote weather monitoring system based on Micro-Electro-Mechanical Systems (MEMS) and wireless sensor network (WSN) technologies comprising sensors for the measurement of temperature, humidity, pressure, wind speed and direction, integrated on a single chip. The sensing signals are transmitted between the Octopus II-A sensor nodes using WSN technology, following amplification and analog/digital conversion (ADC). Experimental results show that the resistance of the micro temperature sensor increases linearly with input temperature, with an average TCR (temperature coefficient of resistance) value of 8.2 x 10(-4) (degrees C-1). The resistance of the pressure sensor also increases linearly with air pressure, with an average sensitivity value of 3.5 x 10(-2) (Omega/kPa). The sensitivity to humidity increases with ambient temperature due to the effect of temperature on the dielectric constant, which was determined to be 16.9, 21.4, 27.0, and 38.2 (pF/% RH) at 27 degrees C, 30 degrees C, 40 degrees C, and 50 degrees C, respectively. The velocity of airflow is obtained by summing the variations in resistor response as airflow passed over the sensors providing sensitivity of 4.2 x 10(-2), 9.2 x 10(-2), 9.7 x 10(-2) (Omega/ms(-1)) with power consumption by the heating resistor of 0.2, 0.3, and 0.5 W, respectively. The passage of air across the surface of the flow sensors prompts variations in temperature among each of the sensing resistors. Evaluating these variations in resistance caused by the temperature change enables the measurement of wind direction.
引用
收藏
页码:2715 / 2727
页数:13
相关论文
共 13 条
[1]   Thin films of In2O3/SiO for humidity sensing applications [J].
Arshak, K ;
Twomey, K .
SENSORS, 2002, 2 (06) :205-218
[2]   A ceramic thick film humidity sensor based on MnZn ferrite [J].
Arshaka, K ;
Twomey, K ;
Egan, D .
SENSORS, 2002, 2 (02) :50-61
[3]  
Bakker A., 2002, PROC IEEE SENSORS C, V2, P1423, DOI DOI 10.1109/ICSENS.2002.1037330
[4]   Fabrication and Performance of MEMS-Based Pressure Sensor Packages Using Patterned Ultra-Thick Photoresists [J].
Chen, Lung-Tai ;
Chang, Jin-Sheng ;
Hsu, Chung-Yi ;
Cheng, Wood-Hi .
SENSORS, 2009, 9 (08) :6200-6218
[5]   A low-voltage force-balanced barometric pressure sensor [J].
Gogoi, BP ;
Mastrangelo, CH .
IEDM - INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST 1996, 1996, :529-532
[6]   Humidity sensors: A review [J].
Lee, CY ;
Lee, GB .
SENSOR LETTERS, 2005, 3 (01) :1-15
[7]   Micromachine-based humidity sensors with integrated temperature sensors for signal drift compensation [J].
Lee, CY ;
Lee, GB .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (05) :620-627
[8]  
Lee CY, 2002, INT J NONLINEAR SCI, V3, P215, DOI 10.1515/IJNSNS.2002.3.3-4.215
[9]  
LEE CY, 2008, ADV MAT RES, V6, P100
[10]   A MEMS-Based Flow Rate and Flow Direction Sensing Platform with Integrated Temperature Compensation Scheme [J].
Ma, Rong-Hua ;
Wang, Dung-An ;
Hsueh, Tzu-Han ;
Lee, Chia-Yen .
SENSORS, 2009, 9 (07) :5460-5476