共 13 条
[3]
Bakker A., 2002, PROC IEEE SENSORS C, V2, P1423, DOI DOI 10.1109/ICSENS.2002.1037330
[5]
A low-voltage force-balanced barometric pressure sensor
[J].
IEDM - INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST 1996,
1996,
:529-532
[8]
Lee CY, 2002, INT J NONLINEAR SCI, V3, P215, DOI 10.1515/IJNSNS.2002.3.3-4.215
[9]
LEE CY, 2008, ADV MAT RES, V6, P100