Asymmetric focused-ion-beam trimming of longitudinal and perpendicular write heads

被引:1
作者
Clinton, TW [1 ]
Zhang, ZZ
Feng, YC
van der Heijden, PAA
机构
[1] Seagate Technol, Seagate Res, Pittsburgh, PA 15222 USA
[2] ART Lab, Seagate Technol, Fremont, CA 94538 USA
关键词
disk drives; focused ion beam; magnetic heads; magnetic recording; system analysis and design;
D O I
10.1109/TMAG.2003.815465
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel focused-ion-beam (FIB) head trimming technique is described. As compared to the conventional approach of a symmetric trim, an asymmetric process, whereby only one side of a write pole is FIB milled to achieve the target width, is demonstrated to be robust and advantageous. We use this technique for both longitudinal and perpendicular HGA-level head trimming, demonstrating excellent recording performance out to areal densities of more than 100 Gb/in(2).
引用
收藏
页码:2408 / 2410
页数:3
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